Abstract
Micro Electrical Discharge Machining (micro-EDM) process and micro Wire Electrical Discharge Machining (micro-WEDM) process have been proven to be appropriate techniques for fabrication of three-dimensional micro parts and high aspect ratio micro structures. The structural feature of micro-gear shaft and the machining characteristics of micro-EDM and micro-WEDM were analyzed in this paper. Then a process flow for fabrication of micro-gear shaft was proposed, which combines micro-EDM and micro-WEDM, and the machining accuracy and efficiency were analyzed. A micro-gear shaft with pith diameter of 350 μm was fabricated by this method.
| Original language | English |
|---|---|
| Pages (from-to) | 1577-1582 |
| Number of pages | 6 |
| Journal | Jilin Daxue Xuebao (Gongxueban)/Journal of Jilin University (Engineering and Technology Edition) |
| Volume | 40 |
| Issue number | 6 |
| State | Published - Nov 2010 |
Keywords
- MEMS
- Micro-EDM milling
- Micro-WEDM
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