Fabrication of hierarchical structures by unconventional two-step imprinting

Gang Shi; Nan Lu; Hongbo Xu; Yandong Wang; Shoulei Shi; Hui Li; Ying Li; Lifeng Chi

doi:10.1016/j.jcis.2011.11.042

Fabrication of hierarchical structures by unconventional two-step imprinting

Gang Shi
, Nan Lu^*
, Hongbo Xu
, Yandong Wang
, Shoulei Shi
, Hui Li
, Ying Li
, Lifeng Chi

^*Corresponding author for this work

Jilin University
University of Münster

Research output: Contribution to journal › Article › peer-review

20 Scopus citations

Abstract

We present a simple sequential imprinting lithography method to fabricate micro/nanoscale hierarchical structures. This method involves hot embossing and capillary force lithography with two stamps of different microscales, which avoids using nanoscale stamps. By varying the experimental conditions in the capillary force lithography process, the morphology of the resulting structures can be controlled. This method may provide a facile and low-cost route for fabricating large area patterns of hierarchical structures.

Original language	English
Pages (from-to)	655-659
Number of pages	5
Journal	Journal of Colloid and Interface Science
Volume	368
Issue number	1
DOIs	https://doi.org/10.1016/j.jcis.2011.11.042
State	Published - 15 Feb 2012
Externally published	Yes

Keywords

Capillary force lithography
Hierarchical structure
Microscale stamp

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10.1016/j.jcis.2011.11.042

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abstract = "We present a simple sequential imprinting lithography method to fabricate micro/nanoscale hierarchical structures. This method involves hot embossing and capillary force lithography with two stamps of different microscales, which avoids using nanoscale stamps. By varying the experimental conditions in the capillary force lithography process, the morphology of the resulting structures can be controlled. This method may provide a facile and low-cost route for fabricating large area patterns of hierarchical structures.",

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author = "Gang Shi and Nan Lu and Hongbo Xu and Yandong Wang and Shoulei Shi and Hui Li and Ying Li and Lifeng Chi",

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T1 - Fabrication of hierarchical structures by unconventional two-step imprinting

AU - Shi, Gang

AU - Lu, Nan

AU - Xu, Hongbo

AU - Wang, Yandong

AU - Shi, Shoulei

AU - Li, Hui

AU - Li, Ying

AU - Chi, Lifeng

PY - 2012/2/15

Y1 - 2012/2/15

N2 - We present a simple sequential imprinting lithography method to fabricate micro/nanoscale hierarchical structures. This method involves hot embossing and capillary force lithography with two stamps of different microscales, which avoids using nanoscale stamps. By varying the experimental conditions in the capillary force lithography process, the morphology of the resulting structures can be controlled. This method may provide a facile and low-cost route for fabricating large area patterns of hierarchical structures.

AB - We present a simple sequential imprinting lithography method to fabricate micro/nanoscale hierarchical structures. This method involves hot embossing and capillary force lithography with two stamps of different microscales, which avoids using nanoscale stamps. By varying the experimental conditions in the capillary force lithography process, the morphology of the resulting structures can be controlled. This method may provide a facile and low-cost route for fabricating large area patterns of hierarchical structures.

KW - Capillary force lithography

KW - Hierarchical structure

KW - Microscale stamp

UR - https://www.scopus.com/pages/publications/84855830360

U2 - 10.1016/j.jcis.2011.11.042

DO - 10.1016/j.jcis.2011.11.042

M3 - 文章

C2 - 22206968

AN - SCOPUS:84855830360

SN - 0021-9797

VL - 368

SP - 655

EP - 659

JO - Journal of Colloid and Interface Science

JF - Journal of Colloid and Interface Science

IS - 1

ER -

Fabrication of hierarchical structures by unconventional two-step imprinting

Abstract

Keywords

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