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Fabrication of grating structures in chalcogenide films using direct exposure

  • Yinghao Cao
  • , Yue Zhang
  • , Wenlong Che
  • , Yao Zhou
  • , Jianxing Zhao
  • , Jianhong Zhou*
  • , Yinglin Song*
  • *Corresponding author for this work
  • Changchun University of Science and Technology
  • School of Physics, Harbin Institute of Technology

Research output: Contribution to journalArticlepeer-review

Abstract

Chalcogenide glasses are widely applied in the fields of infrared optics and nonlinear optics, which has spurred extensive research into their processing and fabrication, particularly for grating structures. We propose a novel method for fabricating grating structures in chalcogenide glass thin films utilizing their photobleaching effect via direct exposure, which is a physical process driven by light-induced oxidation and bond rearrangement. This phenomenon leads to localized changes in the refractive index, enabling the creation of high quality gratings. Two kinds of grating structure were fabricated which perform well in the diffraction effect. This method is easy to implement and cost-effective, making it ideal for large-scale production with promising applications, particularly in integrated photonics.

Original languageEnglish
Article number045518
JournalPhysica Scripta
Volume100
Issue number4
DOIs
StatePublished - 1 Apr 2025
Externally publishedYes

Keywords

  • chalcogenide glasses
  • direct exposure method
  • grating fabrication
  • photobleaching effect

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