Abstract
A novel hybrid plasma fabrication technique combining plasma nitriding and plasma immersion ion implantation (PIII) were used to make titanium oxide films that possess good blood compatibility and can withstand a high contact stress. The Ti alloys were first nitrided in a N plasma and then the TiOx coating was produced by PIII utilizing Ti metal plasma and reactive plasma oxidation. The Ti-N layer produced by plasma nitriding can withstand a high contact stress, and the TiO coating generated by PIII yields improved biocompatibility and tribological properties. The results showed that Ti alloys with surface duplex PIII-TiOx/Ti-N films have better load bearing capacity than that of PIII-TiOx films.
| Original language | English |
|---|---|
| Pages (from-to) | 211 |
| Number of pages | 1 |
| Journal | IEEE International Conference on Plasma Science |
| DOIs | |
| State | Published - 2000 |
| Externally published | Yes |
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