@inproceedings{3b9894e4614c4fcab9dac1d0838f2e3c,
title = "Fabrication of a flexible metal/polymer mold with liquid crystal polymer material for hot-embossing process",
abstract = "A flexible polymer is considered as an alternative of lowcost mold materials. Molds with a high density aspect ratio, smooth surface, vertical sidewalls and lightweight have been fabricated and it is easy-to-use features in the hot embossing process. The study also indicated that the flexible metal/polymer mold could be used for thermoplastic polymer patterning with high fidelity and low cost. Using the flexible metal/polymer mold, 10um and 5um structures were fabricated.",
author = "Lu Haijing and Fang, \{Ang Xiao\} and Liu Hongping and Sun Zheng and Wei Jun",
year = "2010",
doi = "10.1115/IMECE2010-38348",
language = "英语",
isbn = "9780791844274",
series = "ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)",
publisher = "American Society of Mechanical Engineers (ASME)",
number = "PARTS A AND B",
pages = "871--874",
booktitle = "Design and Manufacturing",
address = "美国",
edition = "PARTS A AND B",
note = "ASME 2010 International Mechanical Engineering Congress and Exposition, IMECE 2010 ; Conference date: 12-11-2010 Through 18-11-2010",
}