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Fabrication-Friendly Ultra-Long Waveguide Grating Antenna for Silicon-on-Insulator Platform

  • Jiaxin Chen
  • , Wanxin Li
  • , Jinzhao Wang
  • , Jiewen Li
  • , Weiming Yao
  • , Zhengquan Huang
  • , Yong Yao
  • , Xiaochuan Xu

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Light detection and ranging (LiDAR) based on the optical phased array (OPA) on silicon photonics platform has been attracting intensive attention. Beam width and field-of-view are two critical design parameters for OPAs, which are determined by the length waveguide grating antenna (WGA) and the high packing density of the WGA array. However, the high index contrast on silicon-on-insulator (SOI) brings a great challenge to implementing long WGA and high packing density simultaneously. In this paper, we propose a fabrication-friendly WGA with weak perturbation strength achieved by placing subwavelength silicon segments around strip waveguide. Bound state in the continuum (BIC) is leveraged to suppress the sidewall emission. We theoretically and experimentally demonstrated a millimeter-long WGA with a feature size over 100 nm on SOI. A beam width of 0.13° is experimentally observed.

Original languageEnglish
Title of host publication2021 Optoelectronics Global Conference, OGC 2021
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages235-238
Number of pages4
ISBN (Electronic)9781665431941
DOIs
StatePublished - 2021
Externally publishedYes
Event2021 Optoelectronics Global Conference, OGC 2021 - Shenzhen, China
Duration: 15 Sep 202118 Sep 2021

Publication series

Name2021 Optoelectronics Global Conference, OGC 2021

Conference

Conference2021 Optoelectronics Global Conference, OGC 2021
Country/TerritoryChina
CityShenzhen
Period15/09/2118/09/21

Keywords

  • grating antenna
  • optical phased array
  • silicon photonics

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