Fabrication and simulation of an electromagnetic microrelay

The fabrication and simulation of an electromagnetic microrelay are presented based on micro electromechanical systems (MEMS) technique. The microrelay dimensions of about 4 mm×4 mm× 0.5 mm are fabricated with the common technique of micrormachining. Compared with the traditional relays, a planar coil is substituted for a solenoid coil to favor the MEMS fabrication. Moreover, a bi-supporter cantilever beam with high sensitivity is fabricated to act as the movable electrode of the microrelay. Theoretical calculations and simulations are also carried out with respect to the electromagnetic force yielded by the exciting electromagnetic coil. The structure and parameters concerning the electromagnetic microrelay can be optimized using the results.