Fabrication and Raman scattering behavior of novel turbostratic BN thin films

B. Zhong; T. Zhang; X. X. Huang; G. W. Wen; J. W. Chen; C. J. Wang; Y. D. Huang

doi:10.1016/j.matlet.2015.03.059

Fabrication and Raman scattering behavior of novel turbostratic BN thin films

B. Zhong
, T. Zhang
, X. X. Huang^*
, G. W. Wen
, J. W. Chen
, C. J. Wang
, Y. D. Huang

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

20 Scopus citations

Abstract

Abstract Novel turbostratic BN thin films have been fabricated via a facile chemical vapor deposition route on SiO₂/Si substrates. The BN thin film grew continuously on the entire SiO₂/Si surface and the region with uniform thickness (∼150 nm) can be up to several centimeters in lateral size which is only limited by the size of the substrate. The thin film exhibited a novel turbostratic graphite-like structure. Moreover, the micro-Raman spectrum of the thin film was found unexpectedly broadened and blue-shifted relative to that of the bulk hexagonal BN. The reason for the peculiar Raman scattering behavior of the turbostratic BN thin films was briefly discussed.

Original language	English
Article number	18651
Pages (from-to)	130-133
Number of pages	4
Journal	Materials Letters
Volume	151
DOIs	https://doi.org/10.1016/j.matlet.2015.03.059
State	Published - 15 Jul 2015
Externally published	Yes

Keywords

Ceramics
Chemical vapor deposition
Raman scattering behavior
Thin films
Turbostratic BN film

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10.1016/j.matlet.2015.03.059

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title = "Fabrication and Raman scattering behavior of novel turbostratic BN thin films",

abstract = "Abstract Novel turbostratic BN thin films have been fabricated via a facile chemical vapor deposition route on SiO2/Si substrates. The BN thin film grew continuously on the entire SiO2/Si surface and the region with uniform thickness (∼150 nm) can be up to several centimeters in lateral size which is only limited by the size of the substrate. The thin film exhibited a novel turbostratic graphite-like structure. Moreover, the micro-Raman spectrum of the thin film was found unexpectedly broadened and blue-shifted relative to that of the bulk hexagonal BN. The reason for the peculiar Raman scattering behavior of the turbostratic BN thin films was briefly discussed.",

keywords = "Ceramics, Chemical vapor deposition, Raman scattering behavior, Thin films, Turbostratic BN film",

author = "B. Zhong and T. Zhang and Huang, \{X. X.\} and Wen, \{G. W.\} and Chen, \{J. W.\} and Wang, \{C. J.\} and Huang, \{Y. D.\}",

year = "2015",

month = jul,

day = "15",

doi = "10.1016/j.matlet.2015.03.059",

language = "英语",

volume = "151",

pages = "130--133",

journal = "Materials Letters",

issn = "0167-577X",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Fabrication and Raman scattering behavior of novel turbostratic BN thin films

AU - Zhong, B.

AU - Zhang, T.

AU - Huang, X. X.

AU - Wen, G. W.

AU - Chen, J. W.

AU - Wang, C. J.

AU - Huang, Y. D.

PY - 2015/7/15

Y1 - 2015/7/15

N2 - Abstract Novel turbostratic BN thin films have been fabricated via a facile chemical vapor deposition route on SiO2/Si substrates. The BN thin film grew continuously on the entire SiO2/Si surface and the region with uniform thickness (∼150 nm) can be up to several centimeters in lateral size which is only limited by the size of the substrate. The thin film exhibited a novel turbostratic graphite-like structure. Moreover, the micro-Raman spectrum of the thin film was found unexpectedly broadened and blue-shifted relative to that of the bulk hexagonal BN. The reason for the peculiar Raman scattering behavior of the turbostratic BN thin films was briefly discussed.

AB - Abstract Novel turbostratic BN thin films have been fabricated via a facile chemical vapor deposition route on SiO2/Si substrates. The BN thin film grew continuously on the entire SiO2/Si surface and the region with uniform thickness (∼150 nm) can be up to several centimeters in lateral size which is only limited by the size of the substrate. The thin film exhibited a novel turbostratic graphite-like structure. Moreover, the micro-Raman spectrum of the thin film was found unexpectedly broadened and blue-shifted relative to that of the bulk hexagonal BN. The reason for the peculiar Raman scattering behavior of the turbostratic BN thin films was briefly discussed.

KW - Ceramics

KW - Chemical vapor deposition

KW - Raman scattering behavior

KW - Thin films

KW - Turbostratic BN film

UR - https://www.scopus.com/pages/publications/84926214688

U2 - 10.1016/j.matlet.2015.03.059

DO - 10.1016/j.matlet.2015.03.059

M3 - 文章

AN - SCOPUS:84926214688

SN - 0167-577X

VL - 151

SP - 130

EP - 133

JO - Materials Letters

JF - Materials Letters

M1 - 18651

ER -

Fabrication and Raman scattering behavior of novel turbostratic BN thin films

Abstract

Keywords

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