Extrinsic Fabry-Perot fiber acoustic pressure sensor based on large-area silver diaphragm

Bin Liu; Jie Lin; Huan Liu; An Jin; Peng Jin

doi:10.1016/j.mee.2016.09.005

Extrinsic Fabry-Perot fiber acoustic pressure sensor based on large-area silver diaphragm

Bin Liu
, Jie Lin
, Huan Liu
, An Jin
, Peng Jin^*

^*Corresponding author for this work

Harbin Institute of Technology

Research output: Contribution to journal › Article › peer-review

69 Scopus citations

Abstract

An extrinsic fiber Fabry-Perot interferometric acoustic sensor based on a large-area silver diaphragm is proposed. The thickness and diameter of the silver diaphragm are 160 nm and 2.4 mm, respectively. The flatness of the diaphragm is < 14 μm. Experimental results showed that the sensor has the acoustic sensitivity of − 124.8 dB re 1 V/μPa with a high linear pressure response in the range of 2.5–268 mPa. The mechanical sensitivity of the diaphragm is 28.57 nm/Pa. The sensor exhibits a flat frequency response in the range of 0.2–2.8 kHz. The noise equivalent acoustic signal level is 83 μPa/Hz^1/2 at 1 kHz. The sensor is expected to be used for weak acoustic sensing.

Original language	English
Pages (from-to)	50-54
Number of pages	5
Journal	Microelectronic Engineering
Volume	166
DOIs	https://doi.org/10.1016/j.mee.2016.09.005
State	Published - 1 Dec 2016

Keywords

Acoustic pressure testing
Fabry–Perot
Fiber sensor

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10.1016/j.mee.2016.09.005

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title = "Extrinsic Fabry-Perot fiber acoustic pressure sensor based on large-area silver diaphragm",

abstract = "An extrinsic fiber Fabry-Perot interferometric acoustic sensor based on a large-area silver diaphragm is proposed. The thickness and diameter of the silver diaphragm are 160 nm and 2.4 mm, respectively. The flatness of the diaphragm is < 14 μm. Experimental results showed that the sensor has the acoustic sensitivity of − 124.8 dB re 1 V/μPa with a high linear pressure response in the range of 2.5–268 mPa. The mechanical sensitivity of the diaphragm is 28.57 nm/Pa. The sensor exhibits a flat frequency response in the range of 0.2–2.8 kHz. The noise equivalent acoustic signal level is 83 μPa/Hz1/2 at 1 kHz. The sensor is expected to be used for weak acoustic sensing.",

keywords = "Acoustic pressure testing, Fabry–Perot, Fiber sensor",

author = "Bin Liu and Jie Lin and Huan Liu and An Jin and Peng Jin",

note = "Publisher Copyright: {\textcopyright} 2016 Elsevier B.V.",

year = "2016",

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day = "1",

doi = "10.1016/j.mee.2016.09.005",

language = "英语",

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journal = "Microelectronic Engineering",

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TY - JOUR

T1 - Extrinsic Fabry-Perot fiber acoustic pressure sensor based on large-area silver diaphragm

AU - Liu, Bin

AU - Lin, Jie

AU - Liu, Huan

AU - Jin, An

AU - Jin, Peng

PY - 2016/12/1

Y1 - 2016/12/1

N2 - An extrinsic fiber Fabry-Perot interferometric acoustic sensor based on a large-area silver diaphragm is proposed. The thickness and diameter of the silver diaphragm are 160 nm and 2.4 mm, respectively. The flatness of the diaphragm is < 14 μm. Experimental results showed that the sensor has the acoustic sensitivity of − 124.8 dB re 1 V/μPa with a high linear pressure response in the range of 2.5–268 mPa. The mechanical sensitivity of the diaphragm is 28.57 nm/Pa. The sensor exhibits a flat frequency response in the range of 0.2–2.8 kHz. The noise equivalent acoustic signal level is 83 μPa/Hz1/2 at 1 kHz. The sensor is expected to be used for weak acoustic sensing.

AB - An extrinsic fiber Fabry-Perot interferometric acoustic sensor based on a large-area silver diaphragm is proposed. The thickness and diameter of the silver diaphragm are 160 nm and 2.4 mm, respectively. The flatness of the diaphragm is < 14 μm. Experimental results showed that the sensor has the acoustic sensitivity of − 124.8 dB re 1 V/μPa with a high linear pressure response in the range of 2.5–268 mPa. The mechanical sensitivity of the diaphragm is 28.57 nm/Pa. The sensor exhibits a flat frequency response in the range of 0.2–2.8 kHz. The noise equivalent acoustic signal level is 83 μPa/Hz1/2 at 1 kHz. The sensor is expected to be used for weak acoustic sensing.

KW - Acoustic pressure testing

KW - Fabry–Perot

KW - Fiber sensor

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U2 - 10.1016/j.mee.2016.09.005

DO - 10.1016/j.mee.2016.09.005

M3 - 文章

AN - SCOPUS:84991665817

SN - 0167-9317

VL - 166

SP - 50

EP - 54

JO - Microelectronic Engineering

JF - Microelectronic Engineering

ER -

Extrinsic Fabry-Perot fiber acoustic pressure sensor based on large-area silver diaphragm

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Keywords

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