@inproceedings{a9c542c5559b4172a387a536611cfe00,
title = "Experimental verification of alignment related errors in position metrology of axes of rotation",
abstract = "A method for characterizing the position repeatability was analyzed for measurement errors and shown experimentally. In the experimental case given the uncertainty of the measurement should be no greater than 1.5 arc second for an evaluation in the off-axis mode for the stated position accuracies of the rotary stage and linear slider stage.",
author = "Jianjun Du and Wenjun Kang and Bridges, \{Philip A.\} and Miller, \{Jimmie A.\}",
year = "2015",
language = "英语",
series = "Proceedings - ASPE 2015 Annual Meeting",
publisher = "American Society for Precision Engineering, ASPE",
pages = "474--479",
booktitle = "Proceedings - ASPE 2015 Annual Meeting",
note = "30th Annual Meeting of the American Society for Precision Engineering, ASPE 2015 ; Conference date: 01-11-2015 Through 06-11-2015",
}