Evaluation of texture in Pb(Zr_0.52Ti_0.48)O ₃ films prepared by sol-gel route

A simple method was presented to characterize the texture of Pb(Zr _0.52Ti_0.48)O₃ (PZT) films prepared by sol-gel route. The effects of film thickness, annealing temperature and annealing time on the texture in PZT films were evaluated using a ω-scan X-ray diffraction (XRD). The ω-scan curve of XRD can be fitted by Gaussian curve, and the misorientation degree (w) defined as the integrated width of the Gaussian curve can be obtained for the films. The XRD results indicated that annealed PZT thin films with various processes were well-crystallized and (111)-oriented. The detailed analysis of ω-scan XRD revealed that the misorientation degrees of (111) orientation in the films with different processes are different. The lower w value can be attained at certain annealing temperature and time.