@inproceedings{eb658500276944b1b03ddbc15a5c4db7,
title = "Error separation and dynamic compensation method in coplanar planar grating displacement measurement system",
abstract = "To improve the measurement accuracy of two-dimensional (2D) precision working stages in the semiconductor manufacturing industry, an error separation and dynamic compensation method based on a planar grating is proposed for a 2D coplanar displacement measurement system. In the system, a planar grating of HEIDENHAIN PP281R is fixed in the center of precision working stage to build coplanar structure and reduce Abbe errors. And the system errors including grating period carved error, temperature effect, vibration effect and mount effect are modeled, calculated and separated. Then the separated errors are dynamically compensated from the corresponding displacement measurement results through data-processing software. Analysis results show that the proposed error separation and dynamic compensation method based on planar grating can improve the measurement accuracy of the coplanar displacement measurement system effectively.",
keywords = "Displacement Measurement, Dynamic Correction, Error Separation, Planar Grating, Two-Dimensional Working Stage",
author = "Yongmeng Liu and Maoqiang Yuan and Jieru Cao and Jing Ma and Jiubin Tan",
year = "2014",
doi = "10.4028/www.scientific.net/KEM.613.43",
language = "英语",
isbn = "9783038351122",
series = "Key Engineering Materials",
publisher = "Trans Tech Publications Ltd",
pages = "43--50",
booktitle = "Measurement Technology and Intelligent Instruments XI",
address = "瑞士",
note = "11th International Symposium on Measurement Technology and Intelligent Instruments, ISMTII 2013 ; Conference date: 01-07-2013 Through 03-07-2013",
}