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Enhanced performance of Pb0.8La0.1Ca 0.1Ti0.975O3 /Pb (Nb0.01Zr 0.2Ti0.8)O3 multilayer thin films for pyroelectric applications

  • Q. G. Chi*
  • , X. Wang
  • , W. L. Li
  • , W. D. Fei
  • , Q. Q. Lei
  • *Corresponding author for this work
  • Harbin University of Science and Technology
  • Harbin Institute of Technology

Research output: Contribution to journalArticlepeer-review

Abstract

Taking advantage of the relatively low temperature crystallization and high orientation of thin films of Pb0.8La0.1Ca 0.1Ti0.975O3 (PLCT), growth of a highly (100)-oriented PLCT/Pb (Nb0.01Zr0.2Ti0.8)O 3 (PNZT) multilayer film on a Pt/Ti/ SiO2 /Si substrate is achieved at a temperature as low as 450 °C. The interfacial diffusion in the multilayer film is decreased by the low temperature of crystallization. A relatively low dielectric constant and high pyrocoefficient are simultaneously achieved in the highly (100)-oriented PLCT/PNZT multilayer film. The high figure-of-merit obtained for this multilayer film make it a good candidate for application in pyroelectric thin-film devices.

Original languageEnglish
Article number242903
JournalApplied Physics Letters
Volume98
Issue number24
DOIs
StatePublished - 13 Jun 2011
Externally publishedYes

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