Electronically enhancing the long-range nanopositioning accuracy of a Lorentz force actuator

Bimal Jeet Goteea; Qianjun Zhang; Wei Dong

doi:10.1631/FITEE.2200255

Electronically enhancing the long-range nanopositioning accuracy of a Lorentz force actuator

Bimal Jeet Goteea
, Qianjun Zhang
, Wei Dong^*

^*Corresponding author for this work

School of Mechatronics Engineering

Harbin Institute of Technology

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

This paper presents a precision centimeter-range positioner based on a Lorentz force actuator using flexure guides. An additional digital-to-analog converter and an operational amplifier (op amp) circuit together with a suitable controller are used to enhance the positioning accuracy to the nanometer level. First, a suitable coil is designed for the actuator based on the stiffness of the flexure guide model. The flexure mechanism and actuator performance are then verified with finite element analysis. Based on these, a means to enhance the positioning performance electronically is presented together with the control scheme. Finally, a prototype is fabricated, and the performance is evaluated. This positioner features a range of 10 mm with a resolution of 10 nm. The proposed scheme can be extended to other systems.

Translated title of the contribution	以电子方式提升洛伦兹力驱动器的大行程纳米定位精度
Original language	English
Pages (from-to)	1080-1092
Number of pages	13
Journal	Frontiers of Information Technology and Electronic Engineering
Volume	24
Issue number	7
DOIs	https://doi.org/10.1631/FITEE.2200255
State	Published - Jul 2023

Keywords

Flexure guides
Long range
Lorentz force actuator
Nanopositioning
TM36
TN710
Voice coil motor

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10.1631/FITEE.2200255

Cite this

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title = "Electronically enhancing the long-range nanopositioning accuracy of a Lorentz force actuator",

abstract = "This paper presents a precision centimeter-range positioner based on a Lorentz force actuator using flexure guides. An additional digital-to-analog converter and an operational amplifier (op amp) circuit together with a suitable controller are used to enhance the positioning accuracy to the nanometer level. First, a suitable coil is designed for the actuator based on the stiffness of the flexure guide model. The flexure mechanism and actuator performance are then verified with finite element analysis. Based on these, a means to enhance the positioning performance electronically is presented together with the control scheme. Finally, a prototype is fabricated, and the performance is evaluated. This positioner features a range of 10 mm with a resolution of 10 nm. The proposed scheme can be extended to other systems.",

keywords = "Flexure guides, Long range, Lorentz force actuator, Nanopositioning, TM36, TN710, Voice coil motor",

author = "Goteea, \{Bimal Jeet\} and Qianjun Zhang and Wei Dong",

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AU - Zhang, Qianjun

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N2 - This paper presents a precision centimeter-range positioner based on a Lorentz force actuator using flexure guides. An additional digital-to-analog converter and an operational amplifier (op amp) circuit together with a suitable controller are used to enhance the positioning accuracy to the nanometer level. First, a suitable coil is designed for the actuator based on the stiffness of the flexure guide model. The flexure mechanism and actuator performance are then verified with finite element analysis. Based on these, a means to enhance the positioning performance electronically is presented together with the control scheme. Finally, a prototype is fabricated, and the performance is evaluated. This positioner features a range of 10 mm with a resolution of 10 nm. The proposed scheme can be extended to other systems.

AB - This paper presents a precision centimeter-range positioner based on a Lorentz force actuator using flexure guides. An additional digital-to-analog converter and an operational amplifier (op amp) circuit together with a suitable controller are used to enhance the positioning accuracy to the nanometer level. First, a suitable coil is designed for the actuator based on the stiffness of the flexure guide model. The flexure mechanism and actuator performance are then verified with finite element analysis. Based on these, a means to enhance the positioning performance electronically is presented together with the control scheme. Finally, a prototype is fabricated, and the performance is evaluated. This positioner features a range of 10 mm with a resolution of 10 nm. The proposed scheme can be extended to other systems.

KW - Flexure guides

KW - Long range

KW - Lorentz force actuator

KW - Nanopositioning

KW - TM36

KW - TN710

KW - Voice coil motor

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Electronically enhancing the long-range nanopositioning accuracy of a Lorentz force actuator

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Keywords

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