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Electron field emission enhancement effects of nano-diamond films

  • S. G. Wang*
  • , Qing Zhang
  • , S. F. Yoon
  • , J. Ahn
  • , Q. Zhou
  • , Q. Wang
  • , D. J. Yang
  • , J. Q. Li
  • , Sam Zhang Shanyong
  • *Corresponding author for this work
  • Microelectronics Centre
  • Nanyang Technological University

Research output: Contribution to journalArticlepeer-review

Abstract

In this paper, electron field emission properties of nano-diamond films, which were prepared using either CH4/H2/ N2 or CH4 /Ar microwave plasma enhanced chemical vapor deposition, were studied. X-ray photoelectron spectroscopy detection indicates that nitrogen was incorporated into the nano-diamond film grown in CH4/H2/N2 mixture. This nano-diamond film shows a very low threshold electric field of 2.2 V/μm and a high emission current density of 720 μA/cm2 at applied field of 6.4 V/μm. Nitrogen incorporation, high grain boundary density and sp2-bonded non-diamond components in the films are believed to be responsible for the electron emission enhancement.

Original languageEnglish
Pages (from-to)143-147
Number of pages5
JournalSurface and Coatings Technology
Volume167
Issue number2-3
DOIs
StatePublished - 22 Apr 2003
Externally publishedYes

Keywords

  • Electron emitter
  • Electron field emission
  • MPECVD
  • Nano-diamond film

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