Electron-Beam-Induced Deposition

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

Original language	English
Title of host publication	Encyclopedia of Nanotechnology
Publisher	Springer Netherlands
Pages	1067-1071
Number of pages	5
ISBN (Electronic)	9789401797801
ISBN (Print)	9789401797795
DOIs	https://doi.org/10.1007/978-94-017-9780-1_225
State	Published - 1 Jan 2016
Externally published	Yes

Access to Document

@inbook{ba53852cb5704780a63df0a83565c5f5,

title = "Electron-Beam-Induced Deposition",

author = "Guoqiang Xie",

year = "2016",

month = jan,

day = "1",

doi = "10.1007/978-94-017-9780-1\_225",

language = "英语",

isbn = "9789401797795",

pages = "1067--1071",

booktitle = "Encyclopedia of Nanotechnology",

publisher = "Springer Netherlands",

address = "荷兰",

}