Electron-Beam-Induced Deposition

Guoqiang Xie

doi:10.1007/978-90-481-9751-4_225

Electron-Beam-Induced Deposition

Guoqiang Xie^*

^*Corresponding author for this work

Tohoku University

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

Abstract

Electron-beam-induced

Original language	English
Title of host publication	Encyclopedia of Nanotechnology
Publisher	Springer Science+Business Media
Pages	749-753
Number of pages	5
ISBN (Electronic)	9789048197514
ISBN (Print)	9789048197507
DOIs	https://doi.org/10.1007/978-90-481-9751-4_225
State	Published - 1 Jan 2012
Externally published	Yes

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10.1007/978-90-481-9751-4_225

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title = "Electron-Beam-Induced Deposition",

abstract = "Electron-beam-induced",

author = "Guoqiang Xie",

note = "Publisher Copyright: {\textcopyright} Springer Science+Business Media B.V. 2012",

year = "2012",

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doi = "10.1007/978-90-481-9751-4\_225",

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AU - Xie, Guoqiang

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PY - 2012/1/1

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N2 - Electron-beam-induced

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SN - 9789048197507

SP - 749

EP - 753

BT - Encyclopedia of Nanotechnology

PB - Springer Science+Business Media

ER -

Electron-Beam-Induced Deposition

Abstract

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