Electroluminescence of as-sputtered silicon-rich SiOx films

Wa Li Zhang; Sam Zhang; Ming Yang; Zhen Liu; Zhan Hong Cen; Tupei Chen; Dongping Liu

doi:10.1016/j.vacuum.2009.10.042

Electroluminescence of as-sputtered silicon-rich SiO_x films

Wa Li Zhang
, Sam Zhang^*
, Ming Yang
, Zhen Liu
, Zhan Hong Cen
, Tupei Chen
, Dongping Liu

^*Corresponding author for this work

Nanyang Technological University
Dalian Minzu University

Research output: Contribution to journal › Article › peer-review

19 Scopus citations

Abstract

Si-rich oxide films (SiO_x, 0 < x < 2) were synthesized by reactive magnetron sputtering of a single Si target in a gas mixture of argon and oxygen. Intense visible electroluminescence was observed from the as-deposited SiO_x film. The microstructure of the as-sputtered SiO_x films was characterized by Raman and X-ray photoelectron spectroscopy techniques. Nanoscale amorphous Si clusters formed in the as-sputtered films. The electroluminescence was attributed to the oxygen-deficient defect luminescent centres and the formation of the amorphous Si nanoclusters.

Original language	English
Pages (from-to)	1043-1048
Number of pages	6
Journal	Vacuum
Volume	84
Issue number	8
DOIs	https://doi.org/10.1016/j.vacuum.2009.10.042
State	Published - 24 Mar 2010
Externally published	Yes

Keywords

Electroluminescence
Silicon-rich SiO films
Sputtering

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10.1016/j.vacuum.2009.10.042

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title = "Electroluminescence of as-sputtered silicon-rich SiOx films",

abstract = "Si-rich oxide films (SiOx, 0 < x < 2) were synthesized by reactive magnetron sputtering of a single Si target in a gas mixture of argon and oxygen. Intense visible electroluminescence was observed from the as-deposited SiOx film. The microstructure of the as-sputtered SiOx films was characterized by Raman and X-ray photoelectron spectroscopy techniques. Nanoscale amorphous Si clusters formed in the as-sputtered films. The electroluminescence was attributed to the oxygen-deficient defect luminescent centres and the formation of the amorphous Si nanoclusters.",

keywords = "Electroluminescence, Silicon-rich SiO films, Sputtering",

author = "Zhang, \{Wa Li\} and Sam Zhang and Ming Yang and Zhen Liu and Cen, \{Zhan Hong\} and Tupei Chen and Dongping Liu",

year = "2010",

month = mar,

day = "24",

doi = "10.1016/j.vacuum.2009.10.042",

language = "英语",

volume = "84",

pages = "1043--1048",

journal = "Vacuum",

issn = "0042-207X",

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TY - JOUR

T1 - Electroluminescence of as-sputtered silicon-rich SiOx films

AU - Zhang, Wa Li

AU - Zhang, Sam

AU - Yang, Ming

AU - Liu, Zhen

AU - Cen, Zhan Hong

AU - Chen, Tupei

AU - Liu, Dongping

PY - 2010/3/24

Y1 - 2010/3/24

N2 - Si-rich oxide films (SiOx, 0 < x < 2) were synthesized by reactive magnetron sputtering of a single Si target in a gas mixture of argon and oxygen. Intense visible electroluminescence was observed from the as-deposited SiOx film. The microstructure of the as-sputtered SiOx films was characterized by Raman and X-ray photoelectron spectroscopy techniques. Nanoscale amorphous Si clusters formed in the as-sputtered films. The electroluminescence was attributed to the oxygen-deficient defect luminescent centres and the formation of the amorphous Si nanoclusters.

AB - Si-rich oxide films (SiOx, 0 < x < 2) were synthesized by reactive magnetron sputtering of a single Si target in a gas mixture of argon and oxygen. Intense visible electroluminescence was observed from the as-deposited SiOx film. The microstructure of the as-sputtered SiOx films was characterized by Raman and X-ray photoelectron spectroscopy techniques. Nanoscale amorphous Si clusters formed in the as-sputtered films. The electroluminescence was attributed to the oxygen-deficient defect luminescent centres and the formation of the amorphous Si nanoclusters.

KW - Electroluminescence

KW - Silicon-rich SiO films

KW - Sputtering

UR - https://www.scopus.com/pages/publications/77649239309

U2 - 10.1016/j.vacuum.2009.10.042

DO - 10.1016/j.vacuum.2009.10.042

M3 - 文章

AN - SCOPUS:77649239309

SN - 0042-207X

VL - 84

SP - 1043

EP - 1048

JO - Vacuum

JF - Vacuum

IS - 8

ER -

Electroluminescence of as-sputtered silicon-rich SiO_x films

Abstract

Keywords

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