Electrical properties of reactively sputtered carbon nitride films

Carbon nitride films with β-C₃N₄ crystals of 200 nm grain size were grown on Si (1 0 0) substrates using magnetron sputtering. These films were characterized by transmission electron microscopy, atomic force microscopy, and X-ray photoelectron spectroscopy. Carbon nitride films had low surface roughness. Maximum N/C ratio of 0.5 was achieved in the films. Chemical bonds of sp, sp² and sp³ coexisted in the films. The fraction of each bond was related to the deposition conditions. The resistivities of the films were measured, which ranged from 1 × 10³ to 1 × 10⁷ Ω cm. The measured resistivity results indicated that the carbon nitride films had semiconductive properties. The resistivity largely depended on the sp³/sp² ratio. Effects of N₂ fraction, target current and substrate bias were investigated. All these deposition parameters had influence on the chemical bonds of the films, and on the resistivities too. High sp³/sp² ratio resulted in high resistivity.