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Electrical model of inside sense outside drive frame micro-gyroscope including quadrature error and Coriolis offset

  • Bing Mo*
  • , Xiaowei Liu
  • , Xiaoyun Tan
  • , Weiping Chen
  • , Liang Yin
  • *Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Quadrature error and Coriolis offset are main errors of micro-gyroscopes which caused by manufacturing imperfections. They deteriorate the overall performance of micro-gyroscopes. For inside sense outside drive frame micro-gyroscope, quadrature error and Coriolis offset have their own characters. Based on the mechanical analysis of inside sense outside drive frame micro-gyroscope in imperfect condition, the dynamic equations of condition with quadrature error and Coriolis offset are investigated, and an equivalent electrical model with quadrature error and Coriolis offset is presented. It is convenient to observe the effect of quadrature error and Coriolis offset by equivalent electrical model simulating. Three conditions are simulated and compared. The results indicate that the Coriolis offset reduces the amplitude of instantaneous displacement to a very small extent. Its effect can be neglected. Quadrature error causes an error displacement with the amplitude much bigger than the prefect displacement's amplitude. It is the overwhelming error in ISOD frame micro-gyroscope.

Original languageEnglish
Title of host publicationMicro and Nano Technology - 1st International Conference Society of Micro/Nano Technology, CSMNT
PublisherTrans Tech Publications
Pages236-240
Number of pages5
ISBN (Print)0878493395, 9780878493395
DOIs
StatePublished - 2009
EventMicro and Nano Technology - 1st International Conference Society of Micro/Nano Technology, CSMNT - Beijing, China
Duration: 19 Nov 200822 Nov 2008

Publication series

NameAdvanced Materials Research
Volume60-61
ISSN (Print)1022-6680

Conference

ConferenceMicro and Nano Technology - 1st International Conference Society of Micro/Nano Technology, CSMNT
Country/TerritoryChina
CityBeijing
Period19/11/0822/11/08

Keywords

  • Coriolis offset
  • Equivalent electrical model
  • Micro-gyroscope
  • Quadrature error

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