Effects of substrate rotation on the microstructure of metal sheet fabricated by electron beam physical vapor deposition

Yue Sun; Xiu Lin; Xiaodong He; Jiazhen Zhang; Mingwei Li; Guangping Song; Xinyan Li; Yijie Zhao

doi:10.1016/j.apsusc.2009.01.013

Effects of substrate rotation on the microstructure of metal sheet fabricated by electron beam physical vapor deposition

Yue Sun
, Xiu Lin
, Xiaodong He^*
, Jiazhen Zhang
, Mingwei Li
, Guangping Song
, Xinyan Li
, Yijie Zhao

^*Corresponding author for this work

Harbin Institute of Technology
Nanyang Technological University

Research output: Contribution to journal › Article › peer-review

21 Scopus citations

Abstract

The effects of substrate rotation speed and rotation mode on the microstructure of large-sized metal sheet fabricated by electron beam physical vapor deposition technique were investigated. Helical and columnar microstructures were found in the deposited sheet. Both types of microstructures exhibit no preferential crystallographic orientation. The column inclination under asymmetric vapor incidence pattern was discussed. Integrated vapor incidence angle was found to be effective in evaluating the column inclination.

Original language	English
Pages (from-to)	5831-5836
Number of pages	6
Journal	Applied Surface Science
Volume	255
Issue number	11
DOIs	https://doi.org/10.1016/j.apsusc.2009.01.013
State	Published - 15 Mar 2009

Keywords

Film growth
Helical microstructure
Physical vapor deposition (PVD)

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10.1016/j.apsusc.2009.01.013

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title = "Effects of substrate rotation on the microstructure of metal sheet fabricated by electron beam physical vapor deposition",

abstract = "The effects of substrate rotation speed and rotation mode on the microstructure of large-sized metal sheet fabricated by electron beam physical vapor deposition technique were investigated. Helical and columnar microstructures were found in the deposited sheet. Both types of microstructures exhibit no preferential crystallographic orientation. The column inclination under asymmetric vapor incidence pattern was discussed. Integrated vapor incidence angle was found to be effective in evaluating the column inclination.",

keywords = "Film growth, Helical microstructure, Physical vapor deposition (PVD)",

author = "Yue Sun and Xiu Lin and Xiaodong He and Jiazhen Zhang and Mingwei Li and Guangping Song and Xinyan Li and Yijie Zhao",

year = "2009",

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doi = "10.1016/j.apsusc.2009.01.013",

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T1 - Effects of substrate rotation on the microstructure of metal sheet fabricated by electron beam physical vapor deposition

AU - Sun, Yue

AU - Lin, Xiu

AU - He, Xiaodong

AU - Zhang, Jiazhen

AU - Li, Mingwei

AU - Song, Guangping

AU - Li, Xinyan

AU - Zhao, Yijie

PY - 2009/3/15

Y1 - 2009/3/15

N2 - The effects of substrate rotation speed and rotation mode on the microstructure of large-sized metal sheet fabricated by electron beam physical vapor deposition technique were investigated. Helical and columnar microstructures were found in the deposited sheet. Both types of microstructures exhibit no preferential crystallographic orientation. The column inclination under asymmetric vapor incidence pattern was discussed. Integrated vapor incidence angle was found to be effective in evaluating the column inclination.

AB - The effects of substrate rotation speed and rotation mode on the microstructure of large-sized metal sheet fabricated by electron beam physical vapor deposition technique were investigated. Helical and columnar microstructures were found in the deposited sheet. Both types of microstructures exhibit no preferential crystallographic orientation. The column inclination under asymmetric vapor incidence pattern was discussed. Integrated vapor incidence angle was found to be effective in evaluating the column inclination.

KW - Film growth

KW - Helical microstructure

KW - Physical vapor deposition (PVD)

UR - https://www.scopus.com/pages/publications/61349111995

U2 - 10.1016/j.apsusc.2009.01.013

DO - 10.1016/j.apsusc.2009.01.013

M3 - 文章

AN - SCOPUS:61349111995

SN - 0169-4332

VL - 255

SP - 5831

EP - 5836

JO - Applied Surface Science

JF - Applied Surface Science

IS - 11

ER -

Effects of substrate rotation on the microstructure of metal sheet fabricated by electron beam physical vapor deposition

Abstract

Keywords

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