Effects of pre-existing defects on nanoimprint process investigated by molecular dynamics simulation

In current study molecular dynamics (MD) simulations are performed to reveal effects of pre-existing defects on nanoimprint of single crystal aluminum (Al) thin films. Simulation results suggest that critical force required for plastic deformation initiation decreases with the increase of vacancy volume fraction, but increases with the interstitial volume fraction. It is found that adsorption phenomenon is affected by pre-existing defects, as adsorption phenomenon weakens with the increasing interstitial volume fraction. Pre-existing defects have significant influence on the deformation mechanisms and imprint forces during the nanoimprint processes. Simulation results also show that surface deformation is strongly affected by pre-existing defects.