Effects of plasma excitation power, sample bias, and duty cycle on the structure and surface properties of amorphous carbon thin films fabricated on AISI440 steel by plasma immersion ion implantation

Z. M. Zeng; X. B. Tian; T. K. Kwok; B. Y. Tang; M. K. Fung; P. K. Chu

doi:10.1116/1.1285996

Effects of plasma excitation power, sample bias, and duty cycle on the structure and surface properties of amorphous carbon thin films fabricated on AISI440 steel by plasma immersion ion implantation

Z. M. Zeng^*
, X. B. Tian
, T. K. Kwok
, B. Y. Tang
, M. K. Fung
, P. K. Chu

^*Corresponding author for this work

School of Materials Science and Engineering

City University of Hong Kong
Harbin Institute of Technology

Research output: Contribution to journal › Conference article › peer-review

4 Scopus citations

Abstract

Plasma immersion ion implantation (PIII) was used to synthesize the amorphous carbon thin films on AISI440 steel. Raman spectroscopy, Auger electron spectroscopy, friction coefficient measurement and wear test were used to investigate the effect of the processing parameters, like radio frequency power, sample voltage pulse duty cycle, and target bias on the structure and surface properties of the films. The structure and surface properties were found to differ greatly under different PIII conditions.

Original language	English
Pages (from-to)	2164-2168
Number of pages	5
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	18
Issue number	5
DOIs	https://doi.org/10.1116/1.1285996
State	Published - Sep 2000
Event	47th International Symposium: Vacuum, Thin Films, Surfaces/Interfaces, and Processing - Boston, USA Duration: 2 Oct 2000 → 6 Oct 2000

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Zeng, Z. M., Tian, X. B., Kwok, T. K., Tang, B. Y., Fung, M. K., & Chu, P. K. (2000). Effects of plasma excitation power, sample bias, and duty cycle on the structure and surface properties of amorphous carbon thin films fabricated on AISI440 steel by plasma immersion ion implantation. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 18(5), 2164-2168. https://doi.org/10.1116/1.1285996

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title = "Effects of plasma excitation power, sample bias, and duty cycle on the structure and surface properties of amorphous carbon thin films fabricated on AISI440 steel by plasma immersion ion implantation",

abstract = "Plasma immersion ion implantation (PIII) was used to synthesize the amorphous carbon thin films on AISI440 steel. Raman spectroscopy, Auger electron spectroscopy, friction coefficient measurement and wear test were used to investigate the effect of the processing parameters, like radio frequency power, sample voltage pulse duty cycle, and target bias on the structure and surface properties of the films. The structure and surface properties were found to differ greatly under different PIII conditions.",

author = "Zeng, \{Z. M.\} and Tian, \{X. B.\} and Kwok, \{T. K.\} and Tang, \{B. Y.\} and Fung, \{M. K.\} and Chu, \{P. K.\}",

year = "2000",

month = sep,

doi = "10.1116/1.1285996",

language = "英语",

volume = "18",

pages = "2164--2168",

journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "5",

note = "47th International Symposium: Vacuum, Thin Films, Surfaces/Interfaces, and Processing ; Conference date: 02-10-2000 Through 06-10-2000",

}

Zeng, ZM, Tian, XB, Kwok, TK, Tang, BY, Fung, MK & Chu, PK 2000, 'Effects of plasma excitation power, sample bias, and duty cycle on the structure and surface properties of amorphous carbon thin films fabricated on AISI440 steel by plasma immersion ion implantation', Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, vol. 18, no. 5, pp. 2164-2168. https://doi.org/10.1116/1.1285996

Effects of plasma excitation power, sample bias, and duty cycle on the structure and surface properties of amorphous carbon thin films fabricated on AISI440 steel by plasma immersion ion implantation. / Zeng, Z. M.; Tian, X. B.; Kwok, T. K. et al.
In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 18, No. 5, 09.2000, p. 2164-2168.

Research output: Contribution to journal › Conference article › peer-review

TY - JOUR

T1 - Effects of plasma excitation power, sample bias, and duty cycle on the structure and surface properties of amorphous carbon thin films fabricated on AISI440 steel by plasma immersion ion implantation

AU - Zeng, Z. M.

AU - Tian, X. B.

AU - Kwok, T. K.

AU - Tang, B. Y.

AU - Fung, M. K.

AU - Chu, P. K.

PY - 2000/9

Y1 - 2000/9

N2 - Plasma immersion ion implantation (PIII) was used to synthesize the amorphous carbon thin films on AISI440 steel. Raman spectroscopy, Auger electron spectroscopy, friction coefficient measurement and wear test were used to investigate the effect of the processing parameters, like radio frequency power, sample voltage pulse duty cycle, and target bias on the structure and surface properties of the films. The structure and surface properties were found to differ greatly under different PIII conditions.

AB - Plasma immersion ion implantation (PIII) was used to synthesize the amorphous carbon thin films on AISI440 steel. Raman spectroscopy, Auger electron spectroscopy, friction coefficient measurement and wear test were used to investigate the effect of the processing parameters, like radio frequency power, sample voltage pulse duty cycle, and target bias on the structure and surface properties of the films. The structure and surface properties were found to differ greatly under different PIII conditions.

UR - https://www.scopus.com/pages/publications/0034275309

U2 - 10.1116/1.1285996

DO - 10.1116/1.1285996

M3 - 会议文章

AN - SCOPUS:0034275309

SN - 0734-2101

VL - 18

SP - 2164

EP - 2168

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 5

T2 - 47th International Symposium: Vacuum, Thin Films, Surfaces/Interfaces, and Processing

Y2 - 2 October 2000 through 6 October 2000

ER -

Zeng ZM, Tian XB, Kwok TK, Tang BY, Fung MK, Chu PK. Effects of plasma excitation power, sample bias, and duty cycle on the structure and surface properties of amorphous carbon thin films fabricated on AISI440 steel by plasma immersion ion implantation. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 2000 Sep;18(5):2164-2168. doi: 10.1116/1.1285996

Effects of plasma excitation power, sample bias, and duty cycle on the structure and surface properties of amorphous carbon thin films fabricated on AISI440 steel by plasma immersion ion implantation

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