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Effects of density of gas flow rate on large area diamond growth in hot filament chemical vapor deposition

  • Jie Yu*
  • , Rongfang Huang
  • , Lishi Wen
  • , Changxu Shi
  • *Corresponding author for this work
  • CAS - Institute of Physics
  • CAS - Institute of Metal Research

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)1011-1013
Number of pages3
JournalJournal of Materials Science Letters
Volume17
Issue number12
DOIs
StatePublished - 1998
Externally publishedYes

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