Effects of annealing technique and TiO2 seed layer on the phase composition of 0.7Pb(Mg1/3Nb2/3)O30.3PbTiO 3 film

W. L. Li; J. M. Wang; C. Q. Liu; W. D. Fei

doi:10.1016/j.mssp.2011.05.014

Effects of annealing technique and TiO₂ seed layer on the phase composition of 0.7Pb(Mg_1/3Nb_2/3)O₃0.3PbTiO ₃ film

W. L. Li
, J. M. Wang
, C. Q. Liu
, W. D. Fei^*

^*Corresponding author for this work

Harbin Institute of Technology

Research output: Contribution to journal › Article › peer-review

Abstract

The lead magnesium niobatelead titanate (PMNPT) thin films with and without the TiO₂ seed layer were prepared by a pulsed laser deposition (PLD) deposited on Pt/Ti/SiO₂/Si substrates. The films were treated by two-step annealing and normal annealing with rapid thermal annealing (RTA). The effects of two-step annealing and the TiO₂ seed layer on the phase composition of PMNPT films were studied. The results show that the PMNPT film with TiO₂ seed layer can gain a pure perovskite phase with a high (1 0 0) preferential orientation after the two-step annealing technique.

Original language	English
Pages (from-to)	426-429
Number of pages	4
Journal	Materials Science in Semiconductor Processing
Volume	13
Issue number	5-6
DOIs	https://doi.org/10.1016/j.mssp.2011.05.014
State	Published - 15 Dec 2010
Externally published	Yes

Keywords

Lead magnesium niobatelead titanate
Pulsed laser deposition
Texture
TiO seed layer
Two-step annealing

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10.1016/j.mssp.2011.05.014

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title = "Effects of annealing technique and TiO2 seed layer on the phase composition of 0.7Pb(Mg1/3Nb2/3)O30.3PbTiO 3 film",

abstract = "The lead magnesium niobatelead titanate (PMNPT) thin films with and without the TiO2 seed layer were prepared by a pulsed laser deposition (PLD) deposited on Pt/Ti/SiO2/Si substrates. The films were treated by two-step annealing and normal annealing with rapid thermal annealing (RTA). The effects of two-step annealing and the TiO2 seed layer on the phase composition of PMNPT films were studied. The results show that the PMNPT film with TiO2 seed layer can gain a pure perovskite phase with a high (1 0 0) preferential orientation after the two-step annealing technique.",

keywords = "Lead magnesium niobatelead titanate, Pulsed laser deposition, Texture, TiO seed layer, Two-step annealing",

author = "Li, \{W. L.\} and Wang, \{J. M.\} and Liu, \{C. Q.\} and Fei, \{W. D.\}",

year = "2010",

month = dec,

day = "15",

doi = "10.1016/j.mssp.2011.05.014",

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journal = "Materials Science in Semiconductor Processing",

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TY - JOUR

T1 - Effects of annealing technique and TiO2 seed layer on the phase composition of 0.7Pb(Mg1/3Nb2/3)O30.3PbTiO 3 film

AU - Li, W. L.

AU - Wang, J. M.

AU - Liu, C. Q.

AU - Fei, W. D.

PY - 2010/12/15

Y1 - 2010/12/15

N2 - The lead magnesium niobatelead titanate (PMNPT) thin films with and without the TiO2 seed layer were prepared by a pulsed laser deposition (PLD) deposited on Pt/Ti/SiO2/Si substrates. The films were treated by two-step annealing and normal annealing with rapid thermal annealing (RTA). The effects of two-step annealing and the TiO2 seed layer on the phase composition of PMNPT films were studied. The results show that the PMNPT film with TiO2 seed layer can gain a pure perovskite phase with a high (1 0 0) preferential orientation after the two-step annealing technique.

AB - The lead magnesium niobatelead titanate (PMNPT) thin films with and without the TiO2 seed layer were prepared by a pulsed laser deposition (PLD) deposited on Pt/Ti/SiO2/Si substrates. The films were treated by two-step annealing and normal annealing with rapid thermal annealing (RTA). The effects of two-step annealing and the TiO2 seed layer on the phase composition of PMNPT films were studied. The results show that the PMNPT film with TiO2 seed layer can gain a pure perovskite phase with a high (1 0 0) preferential orientation after the two-step annealing technique.

KW - Lead magnesium niobatelead titanate

KW - Pulsed laser deposition

KW - Texture

KW - TiO seed layer

KW - Two-step annealing

UR - https://www.scopus.com/pages/publications/82455208936

U2 - 10.1016/j.mssp.2011.05.014

DO - 10.1016/j.mssp.2011.05.014

M3 - 文章

AN - SCOPUS:82455208936

SN - 1369-8001

VL - 13

SP - 426

EP - 429

JO - Materials Science in Semiconductor Processing

JF - Materials Science in Semiconductor Processing

IS - 5-6

ER -

Effects of annealing technique and TiO₂ seed layer on the phase composition of 0.7Pb(Mg_1/3Nb_2/3)O₃0.3PbTiO ₃ film

Abstract

Keywords

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