Effect of titanium dioxide (TiO2) seed layer on the phase composition of 0.7Pb (Mg1/3Nb2/3)O3-0.3PbTiO3 film prepared by pulsed laser deposition

J. M. Wang; W. L. Li; C. Q. Liu; W. D. Fei

doi:10.1016/j.mee.2008.06.013

Effect of titanium dioxide (TiO₂) seed layer on the phase composition of 0.7Pb (Mg_1/3Nb_2/3)O₃-0.3PbTiO₃ film prepared by pulsed laser deposition

J. M. Wang
, W. L. Li
, C. Q. Liu
, W. D. Fei^*

^*Corresponding author for this work

Harbin Institute of Technology

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

Lead-magnesium niobate-lead titanate (PMN-PT) thin films with and without the TiO₂ seed layer were deposited on Pt/Ti/SiO₂/Si substrates through pulsed laser deposition. The study aimed to characterize the effect of the TiO₂ seed layer on the phase composition and properties of PMN-PT film. Without the TiO₂ seed layer, the pure perovskite phase could be obtained in the thinner PMN-PT film while with the TiO₂ seed layer, the pure perovskite phase was formed in the thicker PMN-PT film. The ferroelectric properties of PMN-PT films with the TiO₂ seed layer were exhibited. As a result, the maximum amount of remnant polarization reached the amount of 32 μC/cm² for the PMN-PT thin film with the TiO₂ seed layer.

Original language	English
Pages (from-to)	1920-1923
Number of pages	4
Journal	Microelectronic Engineering
Volume	85
Issue number	9
DOIs	https://doi.org/10.1016/j.mee.2008.06.013
State	Published - Sep 2008
Externally published	Yes

Keywords

PMN-PT film
Perovskite phase
Remnant polarization
TiO seed layer

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10.1016/j.mee.2008.06.013

Cite this

@article{7984f88766474e77b0a2b98a67815428,

title = "Effect of titanium dioxide (TiO2) seed layer on the phase composition of 0.7Pb (Mg1/3Nb2/3)O3-0.3PbTiO3 film prepared by pulsed laser deposition",

abstract = "Lead-magnesium niobate-lead titanate (PMN-PT) thin films with and without the TiO2 seed layer were deposited on Pt/Ti/SiO2/Si substrates through pulsed laser deposition. The study aimed to characterize the effect of the TiO2 seed layer on the phase composition and properties of PMN-PT film. Without the TiO2 seed layer, the pure perovskite phase could be obtained in the thinner PMN-PT film while with the TiO2 seed layer, the pure perovskite phase was formed in the thicker PMN-PT film. The ferroelectric properties of PMN-PT films with the TiO2 seed layer were exhibited. As a result, the maximum amount of remnant polarization reached the amount of 32 μC/cm2 for the PMN-PT thin film with the TiO2 seed layer.",

keywords = "PMN-PT film, Perovskite phase, Remnant polarization, TiO seed layer",

author = "Wang, \{J. M.\} and Li, \{W. L.\} and Liu, \{C. Q.\} and Fei, \{W. D.\}",

year = "2008",

month = sep,

doi = "10.1016/j.mee.2008.06.013",

language = "英语",

volume = "85",

pages = "1920--1923",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier B.V.",

number = "9",

}

TY - JOUR

T1 - Effect of titanium dioxide (TiO2) seed layer on the phase composition of 0.7Pb (Mg1/3Nb2/3)O3-0.3PbTiO3 film prepared by pulsed laser deposition

AU - Wang, J. M.

AU - Li, W. L.

AU - Liu, C. Q.

AU - Fei, W. D.

PY - 2008/9

Y1 - 2008/9

N2 - Lead-magnesium niobate-lead titanate (PMN-PT) thin films with and without the TiO2 seed layer were deposited on Pt/Ti/SiO2/Si substrates through pulsed laser deposition. The study aimed to characterize the effect of the TiO2 seed layer on the phase composition and properties of PMN-PT film. Without the TiO2 seed layer, the pure perovskite phase could be obtained in the thinner PMN-PT film while with the TiO2 seed layer, the pure perovskite phase was formed in the thicker PMN-PT film. The ferroelectric properties of PMN-PT films with the TiO2 seed layer were exhibited. As a result, the maximum amount of remnant polarization reached the amount of 32 μC/cm2 for the PMN-PT thin film with the TiO2 seed layer.

AB - Lead-magnesium niobate-lead titanate (PMN-PT) thin films with and without the TiO2 seed layer were deposited on Pt/Ti/SiO2/Si substrates through pulsed laser deposition. The study aimed to characterize the effect of the TiO2 seed layer on the phase composition and properties of PMN-PT film. Without the TiO2 seed layer, the pure perovskite phase could be obtained in the thinner PMN-PT film while with the TiO2 seed layer, the pure perovskite phase was formed in the thicker PMN-PT film. The ferroelectric properties of PMN-PT films with the TiO2 seed layer were exhibited. As a result, the maximum amount of remnant polarization reached the amount of 32 μC/cm2 for the PMN-PT thin film with the TiO2 seed layer.

KW - PMN-PT film

KW - Perovskite phase

KW - Remnant polarization

KW - TiO seed layer

UR - https://www.scopus.com/pages/publications/49549088794

U2 - 10.1016/j.mee.2008.06.013

DO - 10.1016/j.mee.2008.06.013

M3 - 文章

AN - SCOPUS:49549088794

SN - 0167-9317

VL - 85

SP - 1920

EP - 1923

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 9

ER -

Effect of titanium dioxide (TiO₂) seed layer on the phase composition of 0.7Pb (Mg_1/3Nb_2/3)O₃-0.3PbTiO₃ film prepared by pulsed laser deposition

Abstract

Keywords

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