Effect of tip shape on line edge roughness measurement based on atomic force microscopy

Ning Li; Fei Wang; Xuezeng Zhao

doi:10.1063/1.3518973

Effect of tip shape on line edge roughness measurement based on atomic force microscopy

Ning Li^*
, Fei Wang
, Xuezeng Zhao

^*Corresponding author for this work

School of Mechatronics Engineering

Shanghai Second Polytechnic University

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

Atomic force microscopy (AFM) is an important tool in line edge roughness (LER) measurements, where accuracy for line edge identification is influenced by the shape of the tip. In this article, the effect of tip shape on LER measurement based on AFM is studied theoretically. The formulas for calculating the distance between the measured and actual line edge of the sample are presented. The effects of the three kinds of tips with different shapes are experimentally compared for validation. Suggestions on how to reduce measuring error caused by tip shape are also given.

Original language	English
Article number	123703
Journal	Review of Scientific Instruments
Volume	81
Issue number	12
DOIs	https://doi.org/10.1063/1.3518973
State	Published - Dec 2010

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10.1063/1.3518973

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@article{4472742d513549a892f41b14b0163b99,

title = "Effect of tip shape on line edge roughness measurement based on atomic force microscopy",

abstract = "Atomic force microscopy (AFM) is an important tool in line edge roughness (LER) measurements, where accuracy for line edge identification is influenced by the shape of the tip. In this article, the effect of tip shape on LER measurement based on AFM is studied theoretically. The formulas for calculating the distance between the measured and actual line edge of the sample are presented. The effects of the three kinds of tips with different shapes are experimentally compared for validation. Suggestions on how to reduce measuring error caused by tip shape are also given.",

author = "Ning Li and Fei Wang and Xuezeng Zhao",

year = "2010",

month = dec,

doi = "10.1063/1.3518973",

language = "英语",

volume = "81",

journal = "Review of Scientific Instruments",

issn = "0034-6748",

publisher = "American Institute of Physics",

number = "12",

}

TY - JOUR

T1 - Effect of tip shape on line edge roughness measurement based on atomic force microscopy

AU - Li, Ning

AU - Wang, Fei

AU - Zhao, Xuezeng

PY - 2010/12

Y1 - 2010/12

N2 - Atomic force microscopy (AFM) is an important tool in line edge roughness (LER) measurements, where accuracy for line edge identification is influenced by the shape of the tip. In this article, the effect of tip shape on LER measurement based on AFM is studied theoretically. The formulas for calculating the distance between the measured and actual line edge of the sample are presented. The effects of the three kinds of tips with different shapes are experimentally compared for validation. Suggestions on how to reduce measuring error caused by tip shape are also given.

AB - Atomic force microscopy (AFM) is an important tool in line edge roughness (LER) measurements, where accuracy for line edge identification is influenced by the shape of the tip. In this article, the effect of tip shape on LER measurement based on AFM is studied theoretically. The formulas for calculating the distance between the measured and actual line edge of the sample are presented. The effects of the three kinds of tips with different shapes are experimentally compared for validation. Suggestions on how to reduce measuring error caused by tip shape are also given.

UR - https://www.scopus.com/pages/publications/78650868293

U2 - 10.1063/1.3518973

DO - 10.1063/1.3518973

M3 - 文章

AN - SCOPUS:78650868293

SN - 0034-6748

VL - 81

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

IS - 12

M1 - 123703

ER -

Effect of tip shape on line edge roughness measurement based on atomic force microscopy

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