Effect of the Degree of Aluminum Doping on the Mechanical and Tribological Characteristics of Titanium–Aluminum Nitride Films

D. A. Golosov; E. M. Oks; V. A. Burdovitsin; T. D. Nguyen; S. N. Melnikov; S. M. Zavadski; I. L. Pobol; N. A. Kananovich; Xiubo Tian; N. N. Lam

doi:10.3103/S1068366620040066

Effect of the Degree of Aluminum Doping on the Mechanical and Tribological Characteristics of Titanium–Aluminum Nitride Films

D. A. Golosov^*
, E. M. Oks
, V. A. Burdovitsin
, T. D. Nguyen
, S. N. Melnikov
, S. M. Zavadski
, I. L. Pobol
, N. A. Kananovich
, Xiubo Tian
, N. N. Lam

^*Corresponding author for this work

School of Materials Science and Engineering

Belarusian State University of Informatics and Radioelectronics
Tomsk State University of Control Systems and Radioelectronics
Belarus Academy of Sciences

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

The mechanical and tribological characteristics of titanium–aluminum nitride films deposited by the reactive magnetron sputtering of Ti–Al mosaic targets with different aluminum concentrations were studied. The dependences of the elemental composition, microhardness, and friction coefficient on the degree of doping of the films with aluminum and nitrogen concentration in the Ar/N₂ gas mixture during film deposition were obtained. It was found that an increase in the aluminum content in the film results in an increase in film hardness and decrease in the friction coefficient. The optimum nitrogen concentration in the film was achieved at maximum hardness and low values of the friction coefficient. A maximum hardness of 23.5 GPa and a minimum friction coefficient of 0.082 were obtained for films of the composition Ti₅AlN_1.33, which had a Ti/Al ratio of 5 : 1 and a nitrogen deficiency.

Original language	English
Pages (from-to)	304-309
Number of pages	6
Journal	Journal of Friction and Wear
Volume	41
Issue number	4
DOIs	https://doi.org/10.3103/S1068366620040066
State	Published - 1 Jul 2020

Keywords

microhardness
mosaic target
reactive magnetron sputtering
thin films
titanium–aluminum nitride
wear resistance
wear-resistant coatings

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10.3103/S1068366620040066

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Golosov, D. A., Oks, E. M., Burdovitsin, V. A., Nguyen, T. D., Melnikov, S. N., Zavadski, S. M., Pobol, I. L., Kananovich, N. A., Tian, X., & Lam, N. N. (2020). Effect of the Degree of Aluminum Doping on the Mechanical and Tribological Characteristics of Titanium–Aluminum Nitride Films. Journal of Friction and Wear, 41(4), 304-309. https://doi.org/10.3103/S1068366620040066

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title = "Effect of the Degree of Aluminum Doping on the Mechanical and Tribological Characteristics of Titanium–Aluminum Nitride Films",

abstract = "The mechanical and tribological characteristics of titanium–aluminum nitride films deposited by the reactive magnetron sputtering of Ti–Al mosaic targets with different aluminum concentrations were studied. The dependences of the elemental composition, microhardness, and friction coefficient on the degree of doping of the films with aluminum and nitrogen concentration in the Ar/N2 gas mixture during film deposition were obtained. It was found that an increase in the aluminum content in the film results in an increase in film hardness and decrease in the friction coefficient. The optimum nitrogen concentration in the film was achieved at maximum hardness and low values of the friction coefficient. A maximum hardness of 23.5 GPa and a minimum friction coefficient of 0.082 were obtained for films of the composition Ti5AlN1.33, which had a Ti/Al ratio of 5 : 1 and a nitrogen deficiency.",

keywords = "microhardness, mosaic target, reactive magnetron sputtering, thin films, titanium–aluminum nitride, wear resistance, wear-resistant coatings",

author = "Golosov, \{D. A.\} and Oks, \{E. M.\} and Burdovitsin, \{V. A.\} and Nguyen, \{T. D.\} and Melnikov, \{S. N.\} and Zavadski, \{S. M.\} and Pobol, \{I. L.\} and Kananovich, \{N. A.\} and Xiubo Tian and Lam, \{N. N.\}",

note = "Publisher Copyright: {\textcopyright} 2020, Allerton Press, Inc.",

year = "2020",

month = jul,

day = "1",

doi = "10.3103/S1068366620040066",

language = "英语",

volume = "41",

pages = "304--309",

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TY - JOUR

T1 - Effect of the Degree of Aluminum Doping on the Mechanical and Tribological Characteristics of Titanium–Aluminum Nitride Films

AU - Golosov, D. A.

AU - Oks, E. M.

AU - Burdovitsin, V. A.

AU - Nguyen, T. D.

AU - Melnikov, S. N.

AU - Zavadski, S. M.

AU - Pobol, I. L.

AU - Kananovich, N. A.

AU - Tian, Xiubo

AU - Lam, N. N.

PY - 2020/7/1

Y1 - 2020/7/1

N2 - The mechanical and tribological characteristics of titanium–aluminum nitride films deposited by the reactive magnetron sputtering of Ti–Al mosaic targets with different aluminum concentrations were studied. The dependences of the elemental composition, microhardness, and friction coefficient on the degree of doping of the films with aluminum and nitrogen concentration in the Ar/N2 gas mixture during film deposition were obtained. It was found that an increase in the aluminum content in the film results in an increase in film hardness and decrease in the friction coefficient. The optimum nitrogen concentration in the film was achieved at maximum hardness and low values of the friction coefficient. A maximum hardness of 23.5 GPa and a minimum friction coefficient of 0.082 were obtained for films of the composition Ti5AlN1.33, which had a Ti/Al ratio of 5 : 1 and a nitrogen deficiency.

AB - The mechanical and tribological characteristics of titanium–aluminum nitride films deposited by the reactive magnetron sputtering of Ti–Al mosaic targets with different aluminum concentrations were studied. The dependences of the elemental composition, microhardness, and friction coefficient on the degree of doping of the films with aluminum and nitrogen concentration in the Ar/N2 gas mixture during film deposition were obtained. It was found that an increase in the aluminum content in the film results in an increase in film hardness and decrease in the friction coefficient. The optimum nitrogen concentration in the film was achieved at maximum hardness and low values of the friction coefficient. A maximum hardness of 23.5 GPa and a minimum friction coefficient of 0.082 were obtained for films of the composition Ti5AlN1.33, which had a Ti/Al ratio of 5 : 1 and a nitrogen deficiency.

KW - microhardness

KW - mosaic target

KW - reactive magnetron sputtering

KW - thin films

KW - titanium–aluminum nitride

KW - wear resistance

KW - wear-resistant coatings

UR - https://www.scopus.com/pages/publications/85089978992

U2 - 10.3103/S1068366620040066

DO - 10.3103/S1068366620040066

M3 - 文章

AN - SCOPUS:85089978992

SN - 1068-3666

VL - 41

SP - 304

EP - 309

JO - Journal of Friction and Wear

JF - Journal of Friction and Wear

IS - 4

ER -

Effect of the Degree of Aluminum Doping on the Mechanical and Tribological Characteristics of Titanium–Aluminum Nitride Films

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Keywords

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