Effect of sputtering gas pressure on wear resistance and corrosion resistance of niobium films prepared by magnetron sputtering deposition

Niobium films were deposited on the steel substrate using DC sputtering deposition. Influence of sputtering gas pressure on surface morphology, phase structure, wear resistance and corrosion resistance of niobium films has been investigated by scanning electron microscopy (SEM), X-ray diffraction (XRD), atomic force microscopy (AFM), ball-on-disc tester and electrochemical tester respectively. Lower sputtering gas pressure results in the formation of fine-grained and smooth coating with (110) preferred crystal. Higher pressure gives rise to coarse grain, larger roughness and preferential crystal of (211). Better wear resistance and corrosion resistance have been exhibited at the higher or the lower pressure. In contract moderate pressure may lead to worse surface properties. It may be due to the difference of defects on the surfaces and textures of niobium films.