Effect of Pt film thickness on PtSi formation and film surface morphology

Jinghua Yin; Wei Cai; Yufeng Zheng; Liancheng Zhao

doi:10.1016/j.surfcoat.2004.10.070

Effect of Pt film thickness on PtSi formation and film surface morphology

Jinghua Yin^*
, Wei Cai
, Yufeng Zheng
, Liancheng Zhao

^*Corresponding author for this work

Harbin University of Science and Technology
Harbin Institute of Technology

Research output: Contribution to journal › Article › peer-review

21 Scopus citations

Abstract

The effect of Pt film thickness on the formation of platinum silicide (PtSi) phase, distribution of silicides, and surface morphology of PtSi/ Si films was investigated with X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD) and atomic force microscopy (AFM). It was shown that when the film structure was changed from PtSi/Si to Pt/Pt₂Si+PtSi/PtSi/Si, the film morphology changed from a smooth surface to a coarse columnar structure with the increase of the Pt film thickness.

Original language	English
Pages (from-to)	329-334
Number of pages	6
Journal	Surface and Coatings Technology
Volume	198
Issue number	1-3 SPEC. ISS.
DOIs	https://doi.org/10.1016/j.surfcoat.2004.10.070
State	Published - 1 Aug 2005
Externally published	Yes

Keywords

Pt film
PtSi
Surface morphology
Thickness

Access to Document

10.1016/j.surfcoat.2004.10.070

Cite this

@article{1373523dfb664615b6c6ba7d8a4c3033,

title = "Effect of Pt film thickness on PtSi formation and film surface morphology",

abstract = "The effect of Pt film thickness on the formation of platinum silicide (PtSi) phase, distribution of silicides, and surface morphology of PtSi/ Si films was investigated with X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD) and atomic force microscopy (AFM). It was shown that when the film structure was changed from PtSi/Si to Pt/Pt2Si+PtSi/PtSi/Si, the film morphology changed from a smooth surface to a coarse columnar structure with the increase of the Pt film thickness.",

keywords = "Pt film, PtSi, Surface morphology, Thickness",

author = "Jinghua Yin and Wei Cai and Yufeng Zheng and Liancheng Zhao",

year = "2005",

month = aug,

day = "1",

doi = "10.1016/j.surfcoat.2004.10.070",

language = "英语",

volume = "198",

pages = "329--334",

journal = "Surface and Coatings Technology",

issn = "0257-8972",

publisher = "Elsevier B.V.",

number = "1-3 SPEC. ISS.",

}

TY - JOUR

T1 - Effect of Pt film thickness on PtSi formation and film surface morphology

AU - Yin, Jinghua

AU - Cai, Wei

AU - Zheng, Yufeng

AU - Zhao, Liancheng

PY - 2005/8/1

Y1 - 2005/8/1

N2 - The effect of Pt film thickness on the formation of platinum silicide (PtSi) phase, distribution of silicides, and surface morphology of PtSi/ Si films was investigated with X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD) and atomic force microscopy (AFM). It was shown that when the film structure was changed from PtSi/Si to Pt/Pt2Si+PtSi/PtSi/Si, the film morphology changed from a smooth surface to a coarse columnar structure with the increase of the Pt film thickness.

AB - The effect of Pt film thickness on the formation of platinum silicide (PtSi) phase, distribution of silicides, and surface morphology of PtSi/ Si films was investigated with X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD) and atomic force microscopy (AFM). It was shown that when the film structure was changed from PtSi/Si to Pt/Pt2Si+PtSi/PtSi/Si, the film morphology changed from a smooth surface to a coarse columnar structure with the increase of the Pt film thickness.

KW - Pt film

KW - PtSi

KW - Surface morphology

KW - Thickness

UR - https://www.scopus.com/pages/publications/20744433371

U2 - 10.1016/j.surfcoat.2004.10.070

DO - 10.1016/j.surfcoat.2004.10.070

M3 - 文章

AN - SCOPUS:20744433371

SN - 0257-8972

VL - 198

SP - 329

EP - 334

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

IS - 1-3 SPEC. ISS.

ER -

Effect of Pt film thickness on PtSi formation and film surface morphology

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this