Effect of probe offset on ultra-precision measurement of circular profile

In order to further improve the ultra-precision measuring accuracy of circular profile, the sources of probe offset error was analyzed and one-parameter measurement model was established that with probe offset parameter only, and it was concluded that probe offset has a significant effect on the measurement of an object with a small size or large profile deviation; the two-parameter measurement model that with probe offset error d and eccentricity error (e,α) was simultaneously analyzed, and the accurate interaction relationship between d and e is obtained. Simulation results show that probe offset error has a significant amplifying action to eccentricity error, and the measurement error increases as probe offset error increase. This paper provides the basis for further improvement of ultra-precision measuring accuracy of circular profile.