Abstract
Aluminum nitride (AlN) ceramics prepared by a fast spark plasma sintering method were heat-treated by a vacuum pressureless sintering method. Effect of sintering additive on the phase composition, microstructure, thermal and dielectric properties of AlN ceramics during high-temperature heat treatment process was investigated. The results show that the heat treatment enhances the growth of AlN grains and the distribution of secondary phases. Compared to AlN ceramics with single rare earth oxide, the thermal conductivity and dielectric loss of AlN ceramics with earth oxide-CaF2 multiple sintering additive are improved due to the effects of effective removing oxygen and forming evaporable secondary phases.
| Original language | English |
|---|---|
| Pages (from-to) | 1186-1191 |
| Number of pages | 6 |
| Journal | Kuei Suan Jen Hsueh Pao/Journal of the Chinese Ceramic Society |
| Volume | 43 |
| Issue number | 9 |
| DOIs | |
| State | Published - 1 Sep 2015 |
| Externally published | Yes |
Keywords
- Aluminum nitride ceramics
- Dielectric property
- Heat treatment
- Thermal conductivity
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