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Effect of electric-field-assisted thermal treatment on the strain and ferroelectric properties of (100)-oriented ferroelectric Pb(Zr0.52Ti0.48)O3 thin films

  • Siqi Zhang*
  • , Shengkai Wang
  • , Fu Zheng
  • , Chenfei Jin
  • *Corresponding author for this work
  • Harbin Institute of Technology
  • Key Laboratory of Micro-Optics and Photonic Technology of Heilongjiang Province
  • CAS - Institute of Microelectronics
  • Key Laboratory of Microelectronics Devices & Integrated Technology

Research output: Contribution to journalArticlepeer-review

Abstract

Ferroelectric Pb(Zr0.52Ti0.48)O3 thin films were deposited on the Pt/Ti/SiO2/Si substrate by a sol-gel method. As a direct electric field was applied on the films during thermal treatment, strain behavior and ferroelectric properties have been investigated. X-ray diffraction patterns show that great tensile strain exists nearby the interface of the 250 nm thin film while thermal treatment assisted with direct electric field can obviously relax it. The analysis of hysteresis loops indicates that the remnant polarization increases with the thermal treatment time. These results suggest that electric-field-assisted thermal treatment is an effective way to reduce films' tensile strain through the local plastic deformation in Pt layer and enhance the remnant polarization.

Original languageEnglish
Pages (from-to)148-152
Number of pages5
JournalJournal of Physics and Chemistry of Solids
Volume99
DOIs
StatePublished - 1 Dec 2016

Keywords

  • A Nanostructures
  • B Sol-gel growth
  • C X-ray diffraction
  • D Surface properties

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