Effect of deposition time on growth of ZrC/SiC composite coating synthesized by low pressure chemical vapor deposition

Fangwei Wang; Lei Chen; Yujin Wang; Mianyi Yao; Sue Hao; Jiahu Ouyang; Zhenkun Huang

doi:10.1016/j.ceramint.2016.10.187

Effect of deposition time on growth of ZrC/SiC composite coating synthesized by low pressure chemical vapor deposition

Fangwei Wang
, Lei Chen
, Yujin Wang^*
, Mianyi Yao
, Sue Hao
, Jiahu Ouyang
, Zhenkun Huang

^*Corresponding author for this work

Harbin Institute of Technology
University of Michigan, Ann Arbor

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

Present work synthesized ZrC/SiC composite coating on the silicon substrate from ZrCl₄-CH₄-H₂-Ar system by low pressure chemical vapor deposition (LPCVD). The significant effect of deposition time on the growth of ZrC/SiC composite coating, phase composition, microstructure and surface roughness was investigated. Only SiC phase was deposited when the deposition time reached 1 h. With the increase of deposition time, the atomic percentage of Si element decreased, Zr element increased significantly, at the same time, the order structure of sp² carbon improved. A uniform and compact ZrC/SiC composite coating was prepared at 1400 °C for the 4 h deposition time. The growth mechanism of ZrC/SiC composite coating at different deposition time was described in detail.

Original language	English
Pages (from-to)	2853-2858
Number of pages	6
Journal	Ceramics International
Volume	43
Issue number	2
DOIs	https://doi.org/10.1016/j.ceramint.2016.10.187
State	Published - 1 Feb 2017

Keywords

Chemical vapor deposition
Composite coating
Mechanism
Morphology

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10.1016/j.ceramint.2016.10.187

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title = "Effect of deposition time on growth of ZrC/SiC composite coating synthesized by low pressure chemical vapor deposition",

abstract = "Present work synthesized ZrC/SiC composite coating on the silicon substrate from ZrCl4-CH4-H2-Ar system by low pressure chemical vapor deposition (LPCVD). The significant effect of deposition time on the growth of ZrC/SiC composite coating, phase composition, microstructure and surface roughness was investigated. Only SiC phase was deposited when the deposition time reached 1 h. With the increase of deposition time, the atomic percentage of Si element decreased, Zr element increased significantly, at the same time, the order structure of sp2 carbon improved. A uniform and compact ZrC/SiC composite coating was prepared at 1400 °C for the 4 h deposition time. The growth mechanism of ZrC/SiC composite coating at different deposition time was described in detail.",

keywords = "Chemical vapor deposition, Composite coating, Mechanism, Morphology",

author = "Fangwei Wang and Lei Chen and Yujin Wang and Mianyi Yao and Sue Hao and Jiahu Ouyang and Zhenkun Huang",

note = "Publisher Copyright: {\textcopyright} 2016 Elsevier Ltd and Techna Group S.r.l.",

year = "2017",

month = feb,

day = "1",

doi = "10.1016/j.ceramint.2016.10.187",

language = "英语",

volume = "43",

pages = "2853--2858",

journal = "Ceramics International",

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}

TY - JOUR

T1 - Effect of deposition time on growth of ZrC/SiC composite coating synthesized by low pressure chemical vapor deposition

AU - Wang, Fangwei

AU - Chen, Lei

AU - Wang, Yujin

AU - Yao, Mianyi

AU - Hao, Sue

AU - Ouyang, Jiahu

AU - Huang, Zhenkun

PY - 2017/2/1

Y1 - 2017/2/1

N2 - Present work synthesized ZrC/SiC composite coating on the silicon substrate from ZrCl4-CH4-H2-Ar system by low pressure chemical vapor deposition (LPCVD). The significant effect of deposition time on the growth of ZrC/SiC composite coating, phase composition, microstructure and surface roughness was investigated. Only SiC phase was deposited when the deposition time reached 1 h. With the increase of deposition time, the atomic percentage of Si element decreased, Zr element increased significantly, at the same time, the order structure of sp2 carbon improved. A uniform and compact ZrC/SiC composite coating was prepared at 1400 °C for the 4 h deposition time. The growth mechanism of ZrC/SiC composite coating at different deposition time was described in detail.

AB - Present work synthesized ZrC/SiC composite coating on the silicon substrate from ZrCl4-CH4-H2-Ar system by low pressure chemical vapor deposition (LPCVD). The significant effect of deposition time on the growth of ZrC/SiC composite coating, phase composition, microstructure and surface roughness was investigated. Only SiC phase was deposited when the deposition time reached 1 h. With the increase of deposition time, the atomic percentage of Si element decreased, Zr element increased significantly, at the same time, the order structure of sp2 carbon improved. A uniform and compact ZrC/SiC composite coating was prepared at 1400 °C for the 4 h deposition time. The growth mechanism of ZrC/SiC composite coating at different deposition time was described in detail.

KW - Chemical vapor deposition

KW - Composite coating

KW - Mechanism

KW - Morphology

UR - https://www.scopus.com/pages/publications/85006138299

U2 - 10.1016/j.ceramint.2016.10.187

DO - 10.1016/j.ceramint.2016.10.187

M3 - 文章

AN - SCOPUS:85006138299

SN - 0272-8842

VL - 43

SP - 2853

EP - 2858

JO - Ceramics International

JF - Ceramics International

IS - 2

ER -

Effect of deposition time on growth of ZrC/SiC composite coating synthesized by low pressure chemical vapor deposition

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