Effect of accelerating voltage on crystallization of self-standing W-nanodendrites fabricated on SiO2 substrate with electron-beam-induced deposition

Guoqiang Xie; Minghui Song; Kazutaka Mitsuishi; Kazuo Furuya

doi:10.1016/j.physe.2005.06.028

Effect of accelerating voltage on crystallization of self-standing W-nanodendrites fabricated on SiO₂ substrate with electron-beam-induced deposition

Guoqiang Xie^*
, Minghui Song
, Kazutaka Mitsuishi
, Kazuo Furuya

^*Corresponding author for this work

National Institute for Materials Science Tsukuba

Research output: Contribution to journal › Article › peer-review

15 Scopus citations

Abstract

Self-standing W-nanodendrite structures were grown on SiO₂ substrate using an electron-beam-induced deposition (EBID) process with various accelerating voltages from 400 to 1000 kV. Effect of accelerating voltage on crystallization of the nanodendrites was investigated. The nanodendrites consisted of nano-sized grains and amorphous structures. The nano-sized grains were determined to be W crystal in BCC structure. The higher was electron beam accelerating voltage, the higher was crystallinity of the as-fabricated nanodendrites. It is suggested that high-energy electron irradiation enhances diffusion of W atoms in the nanodendrites, promotes crystallization of W grains.

Original language	English
Pages (from-to)	564-569
Number of pages	6
Journal	Physica E: Low-Dimensional Systems and Nanostructures
Volume	29
Issue number	3-4
DOIs	https://doi.org/10.1016/j.physe.2005.06.028
State	Published - Nov 2005
Externally published	Yes

Keywords

Accelerating voltage
Crystallization
Electron-beam-induced deposition
Nanodendrite

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10.1016/j.physe.2005.06.028

Cite this

@article{b45dd87b87004e37814b94cbe96a07be,

title = "Effect of accelerating voltage on crystallization of self-standing W-nanodendrites fabricated on SiO2 substrate with electron-beam-induced deposition",

abstract = "Self-standing W-nanodendrite structures were grown on SiO2 substrate using an electron-beam-induced deposition (EBID) process with various accelerating voltages from 400 to 1000 kV. Effect of accelerating voltage on crystallization of the nanodendrites was investigated. The nanodendrites consisted of nano-sized grains and amorphous structures. The nano-sized grains were determined to be W crystal in BCC structure. The higher was electron beam accelerating voltage, the higher was crystallinity of the as-fabricated nanodendrites. It is suggested that high-energy electron irradiation enhances diffusion of W atoms in the nanodendrites, promotes crystallization of W grains.",

keywords = "Accelerating voltage, Crystallization, Electron-beam-induced deposition, Nanodendrite",

author = "Guoqiang Xie and Minghui Song and Kazutaka Mitsuishi and Kazuo Furuya",

year = "2005",

month = nov,

doi = "10.1016/j.physe.2005.06.028",

language = "英语",

volume = "29",

pages = "564--569",

journal = "Physica E: Low-Dimensional Systems and Nanostructures",

issn = "1386-9477",

publisher = "Elsevier B.V.",

number = "3-4",

}

Effect of accelerating voltage on crystallization of self-standing W-nanodendrites fabricated on SiO₂ substrate with electron-beam-induced deposition. / Xie, Guoqiang; Song, Minghui; Mitsuishi, Kazutaka et al.
In: Physica E: Low-Dimensional Systems and Nanostructures, Vol. 29, No. 3-4, 11.2005, p. 564-569.

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - Effect of accelerating voltage on crystallization of self-standing W-nanodendrites fabricated on SiO2 substrate with electron-beam-induced deposition

AU - Xie, Guoqiang

AU - Song, Minghui

AU - Mitsuishi, Kazutaka

AU - Furuya, Kazuo

PY - 2005/11

Y1 - 2005/11

N2 - Self-standing W-nanodendrite structures were grown on SiO2 substrate using an electron-beam-induced deposition (EBID) process with various accelerating voltages from 400 to 1000 kV. Effect of accelerating voltage on crystallization of the nanodendrites was investigated. The nanodendrites consisted of nano-sized grains and amorphous structures. The nano-sized grains were determined to be W crystal in BCC structure. The higher was electron beam accelerating voltage, the higher was crystallinity of the as-fabricated nanodendrites. It is suggested that high-energy electron irradiation enhances diffusion of W atoms in the nanodendrites, promotes crystallization of W grains.

AB - Self-standing W-nanodendrite structures were grown on SiO2 substrate using an electron-beam-induced deposition (EBID) process with various accelerating voltages from 400 to 1000 kV. Effect of accelerating voltage on crystallization of the nanodendrites was investigated. The nanodendrites consisted of nano-sized grains and amorphous structures. The nano-sized grains were determined to be W crystal in BCC structure. The higher was electron beam accelerating voltage, the higher was crystallinity of the as-fabricated nanodendrites. It is suggested that high-energy electron irradiation enhances diffusion of W atoms in the nanodendrites, promotes crystallization of W grains.

KW - Accelerating voltage

KW - Crystallization

KW - Electron-beam-induced deposition

KW - Nanodendrite

UR - https://www.scopus.com/pages/publications/26944472404

U2 - 10.1016/j.physe.2005.06.028

DO - 10.1016/j.physe.2005.06.028

M3 - 文章

AN - SCOPUS:26944472404

SN - 1386-9477

VL - 29

SP - 564

EP - 569

JO - Physica E: Low-Dimensional Systems and Nanostructures

JF - Physica E: Low-Dimensional Systems and Nanostructures

IS - 3-4

ER -

Effect of accelerating voltage on crystallization of self-standing W-nanodendrites fabricated on SiO₂ substrate with electron-beam-induced deposition

Abstract

Keywords

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