Dualfunctional MEMS optical device with compound electrostatic actuators for compact and flexible photonic networks

Qinghua Chen; Wengang Wu; Haiyang Mao; Bochao Du; Li Li; Yilong Hao

doi:10.1109/ICSENS.2010.5690306

Dualfunctional MEMS optical device with compound electrostatic actuators for compact and flexible photonic networks

Qinghua Chen^*
, Wengang Wu
, Haiyang Mao
, Bochao Du
, Li Li
, Yilong Hao

^*Corresponding author for this work

Peking University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

A MEMS (micro-electromechanical systems) reflection-type dualfunction-integrated optical device is proposed. The device employs the compound in-plane and out-of-plane motion of a dual-slope mirror, which is driven by electrostatic actuators, to operate as optical switch and variable optical attenuator, independently. The MEMS-based dualfunctional devices can minimize the overall system size and weight, reduce external interconnections between individual devices, while at the same time maximize system information capacity, optical throughput, flexibility and reliability. Measurements of the MEMS-based dualfunctional devices show that the switching time is less than 9 ms, the excess loss is less than 3 dB and the controllable attenuation range is up to 39 dB, respectively. Moreover, polarization-dependent loss is less than 0.7 dB in the whole attenuation range.

Original language	English
Title of host publication	IEEE Sensors 2010 Conference, SENSORS 2010
Pages	2061-2064
Number of pages	4
DOIs	https://doi.org/10.1109/ICSENS.2010.5690306
State	Published - 2010
Externally published	Yes
Event	9th IEEE Sensors Conference 2010, SENSORS 2010 - Waikoloa, HI, United States Duration: 1 Nov 2010 → 4 Nov 2010

Publication series

Name	Proceedings of IEEE Sensors

Conference

Conference	9th IEEE Sensors Conference 2010, SENSORS 2010
Country/Territory	United States
City	Waikoloa, HI
Period	1/11/10 → 4/11/10

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10.1109/ICSENS.2010.5690306

Cite this

@inproceedings{6bb6fc72005b4ff786f1aeadd6d0ea2f,

title = "Dualfunctional MEMS optical device with compound electrostatic actuators for compact and flexible photonic networks",

abstract = "A MEMS (micro-electromechanical systems) reflection-type dualfunction-integrated optical device is proposed. The device employs the compound in-plane and out-of-plane motion of a dual-slope mirror, which is driven by electrostatic actuators, to operate as optical switch and variable optical attenuator, independently. The MEMS-based dualfunctional devices can minimize the overall system size and weight, reduce external interconnections between individual devices, while at the same time maximize system information capacity, optical throughput, flexibility and reliability. Measurements of the MEMS-based dualfunctional devices show that the switching time is less than 9 ms, the excess loss is less than 3 dB and the controllable attenuation range is up to 39 dB, respectively. Moreover, polarization-dependent loss is less than 0.7 dB in the whole attenuation range.",

author = "Qinghua Chen and Wengang Wu and Haiyang Mao and Bochao Du and Li Li and Yilong Hao",

year = "2010",

doi = "10.1109/ICSENS.2010.5690306",

language = "英语",

isbn = "9781424481682",

series = "Proceedings of IEEE Sensors",

pages = "2061--2064",

booktitle = "IEEE Sensors 2010 Conference, SENSORS 2010",

note = "9th IEEE Sensors Conference 2010, SENSORS 2010 ; Conference date: 01-11-2010 Through 04-11-2010",

}

Chen, Q, Wu, W, Mao, H, Du, B, Li, L & Hao, Y 2010, Dualfunctional MEMS optical device with compound electrostatic actuators for compact and flexible photonic networks. in IEEE Sensors 2010 Conference, SENSORS 2010., 5690306, Proceedings of IEEE Sensors, pp. 2061-2064, 9th IEEE Sensors Conference 2010, SENSORS 2010, Waikoloa, HI, United States, 1/11/10. https://doi.org/10.1109/ICSENS.2010.5690306

Dualfunctional MEMS optical device with compound electrostatic actuators for compact and flexible photonic networks. / Chen, Qinghua; Wu, Wengang; Mao, Haiyang et al.
IEEE Sensors 2010 Conference, SENSORS 2010. 2010. p. 2061-2064 5690306 (Proceedings of IEEE Sensors).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Dualfunctional MEMS optical device with compound electrostatic actuators for compact and flexible photonic networks

AU - Chen, Qinghua

AU - Wu, Wengang

AU - Mao, Haiyang

AU - Du, Bochao

AU - Li, Li

AU - Hao, Yilong

PY - 2010

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N2 - A MEMS (micro-electromechanical systems) reflection-type dualfunction-integrated optical device is proposed. The device employs the compound in-plane and out-of-plane motion of a dual-slope mirror, which is driven by electrostatic actuators, to operate as optical switch and variable optical attenuator, independently. The MEMS-based dualfunctional devices can minimize the overall system size and weight, reduce external interconnections between individual devices, while at the same time maximize system information capacity, optical throughput, flexibility and reliability. Measurements of the MEMS-based dualfunctional devices show that the switching time is less than 9 ms, the excess loss is less than 3 dB and the controllable attenuation range is up to 39 dB, respectively. Moreover, polarization-dependent loss is less than 0.7 dB in the whole attenuation range.

AB - A MEMS (micro-electromechanical systems) reflection-type dualfunction-integrated optical device is proposed. The device employs the compound in-plane and out-of-plane motion of a dual-slope mirror, which is driven by electrostatic actuators, to operate as optical switch and variable optical attenuator, independently. The MEMS-based dualfunctional devices can minimize the overall system size and weight, reduce external interconnections between individual devices, while at the same time maximize system information capacity, optical throughput, flexibility and reliability. Measurements of the MEMS-based dualfunctional devices show that the switching time is less than 9 ms, the excess loss is less than 3 dB and the controllable attenuation range is up to 39 dB, respectively. Moreover, polarization-dependent loss is less than 0.7 dB in the whole attenuation range.

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SN - 9781424481682

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Y2 - 1 November 2010 through 4 November 2010

ER -

Dualfunctional MEMS optical device with compound electrostatic actuators for compact and flexible photonic networks

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