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Displacement Damage Correlation of Heavy Ion, Proton, and Electron Irradiation in GaAs MESFETs

  • Harbin Institute of Technology
  • Sanan Semiconductor Company Ltd.
  • Nanjing Electronic Devices Institute
  • Accelerator Center

Research output: Contribution to journalArticlepeer-review

Abstract

In this article, we mainly report the radiation response of n-channel depletion-mode gallium arsenide (GaAs) metal-semiconductor field-effect transistors (MESFETs) under heavy ion, proton, and electron irradiation. The maximum transconductance (GMAX ) and drain saturation current (IDSS ), which can reflect the carrier removal and mobility degradation induced by displacement damage, are selected as evaluation indicators, and two kinds of damage factors are derived: KG and KI. The nonionizing energy loss (NIEL) of different particles deposited in the epitaxial channel layer of GaAs MESFETs is calculated and used to correlate KG and KI , respectively. The good linear relationship between damage factors and NIEL makes it possible to predict the degradation of GMAX and IDSS. On this basis, two semiempirical damage equations describing GaAs MESFETs displacement damage are derived and verified by 27-MeV F. We also derive the damage coefficient "γ "in the more general damage equation, which has a value of 5.5× 10-13 g/MeV for GMAX and 8.9× 10-13 g/MeV for IDSS. Besides, MESFETs made from other materials may also align with the damage equation. A single irradiation experiment can determine the damage coefficient γ values in principle. This work extends the application of the NIEL-based displacement damage dose (DDD) method in GaAs MESFETs.

Original languageEnglish
Pages (from-to)858-865
Number of pages8
JournalIEEE Transactions on Nuclear Science
Volume72
Issue number3
DOIs
StatePublished - 2025
Externally publishedYes

Keywords

  • Damage factor
  • displacement damage
  • electrons
  • gallium arsenide (GaAs)
  • heavy ions
  • metal-semiconductor field-effect transistors (MESFETs)
  • nonionizing energy loss (NIEL) scaling
  • protons

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