Diagnostics of a microhollow cathode discharge at atmospheric pressure

Based on a sandwich-like structure, a microhollow cathode discharge device is designed, and a stable discharge is realized by injecting helium into the discharge region of the device at atmospheric pressure. A wall probe is used to determine the relevant parameters of the plasma generated by the device, such as particle density, electron temperature, and the electron distribution function. At the same time, a sink parameter is used to correct the electron distribution function of the wall-probe diagnostics, and to further study the relationship between electron density and the electron temperature of the corrected electron distribution function.