TY - GEN
T1 - Development of surface image scanning device measurement head mechanism based on AFM
AU - Zhou, L.
AU - Zhang, H. B.
AU - Liu, Q.
PY - 2008
Y1 - 2008
N2 - For the measurement of ultra smooth surface topography, a surface image scanning device measurement head mechanism based on the principle of atomic force microscope (AFM) was designed. It uses coarse adjustment, semi-delicate adjustment, delicate adjustment triple-stage adjustment mechanism, and tests the atomic force between the sample and the probe by using laser generator, position sensitive detector (PSD), cantilever and probe. This mechanism has high setting accuracy and resetting accuracy, combined with two-dimension movable table, can scan the surface topography of samples.
AB - For the measurement of ultra smooth surface topography, a surface image scanning device measurement head mechanism based on the principle of atomic force microscope (AFM) was designed. It uses coarse adjustment, semi-delicate adjustment, delicate adjustment triple-stage adjustment mechanism, and tests the atomic force between the sample and the probe by using laser generator, position sensitive detector (PSD), cantilever and probe. This mechanism has high setting accuracy and resetting accuracy, combined with two-dimension movable table, can scan the surface topography of samples.
KW - Atomic force microscope (AFM)
KW - Cantilever
KW - Position sensitive detector (PSD)
KW - Surface topography
UR - https://www.scopus.com/pages/publications/45749152118
U2 - 10.4028/www.scientific.net/AMM.10-12.828
DO - 10.4028/www.scientific.net/AMM.10-12.828
M3 - 会议稿件
AN - SCOPUS:45749152118
SN - 0878494707
SN - 9780878494705
T3 - Applied Mechanics and Materials
SP - 828
EP - 832
BT - e-Engineering and Digital Enterprise Technology
PB - Trans Tech Publications Ltd
ER -