@inproceedings{b27a35120b9546e9a3d2d93ba807f6a3,
title = "Development of on-machine surface profile measuring instrument based on white light interference principle",
abstract = "For most of the current white light interferometer mechanical structure are vertical structure and the size of the inspected parts have limitations, this paper mainly uses white light vertical scanning measurement technology to develop the measurement system for in-situ measurement of ultra-precision machined parts surface three-dimensional topography, white light interferometer mechanical structure design and machine tool integration, to carry out the design of the mechanical structure of the white light interferometer and the integration of the machine tool, and the completion of the measurement system to build a physical example of the system to test the verification of the reliability of the system.",
keywords = "in-situ measurement., surface roughness, three-dimensional reconstruction, white light interferometry",
author = "Yuejia Huang and Duo Li and Bo Wang",
note = "Publisher Copyright: {\textcopyright} COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only.; 8th Asia Pacific Conference on Optics Manufacture, APCOM 2023 and 3rd International Forum of Young Scientists on Advanced Optical Manufacturing, YSAOM 2023 ; Conference date: 04-08-2023 Through 06-08-2023",
year = "2023",
doi = "10.1117/12.3009730",
language = "英语",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Xuejun Zhang and Xiaoyong Wang and Yifan Dai and Lingbao Kong and Dawei Zhang and Feng Gong and Lihua Li",
booktitle = "Eighth Asia Pacific Conference on Optics Manufacture and Third International Forum of Young Scientists on Advanced Optical Manufacturing, APCOM and YSAOM 2023",
address = "美国",
}