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Development of on-machine surface profile measuring instrument based on white light interference principle

  • Yuejia Huang
  • , Duo Li*
  • , Bo Wang
  • *Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

For most of the current white light interferometer mechanical structure are vertical structure and the size of the inspected parts have limitations, this paper mainly uses white light vertical scanning measurement technology to develop the measurement system for in-situ measurement of ultra-precision machined parts surface three-dimensional topography, white light interferometer mechanical structure design and machine tool integration, to carry out the design of the mechanical structure of the white light interferometer and the integration of the machine tool, and the completion of the measurement system to build a physical example of the system to test the verification of the reliability of the system.

Original languageEnglish
Title of host publicationEighth Asia Pacific Conference on Optics Manufacture and Third International Forum of Young Scientists on Advanced Optical Manufacturing, APCOM and YSAOM 2023
EditorsXuejun Zhang, Xiaoyong Wang, Yifan Dai, Lingbao Kong, Dawei Zhang, Feng Gong, Lihua Li
PublisherSPIE
ISBN (Electronic)9781510672673
DOIs
StatePublished - 2023
Event8th Asia Pacific Conference on Optics Manufacture, APCOM 2023 and 3rd International Forum of Young Scientists on Advanced Optical Manufacturing, YSAOM 2023 - Shenzhen, China
Duration: 4 Aug 20236 Aug 2023

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume12976
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

Conference8th Asia Pacific Conference on Optics Manufacture, APCOM 2023 and 3rd International Forum of Young Scientists on Advanced Optical Manufacturing, YSAOM 2023
Country/TerritoryChina
CityShenzhen
Period4/08/236/08/23

Keywords

  • in-situ measurement.
  • surface roughness
  • three-dimensional reconstruction
  • white light interferometry

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