Abstract
Multi-DOF micro-motion ultra-precision planar motors have many advantages such as high precision, high speed, high frequency response and so on. It has broad application prospects in modern precision, ultra-precision machining equipment domains such as semiconductor photolithography processing, ultra precise measurement, biological chip technology. In recent years, multi-DOF micro-motion ultra-precision planar motors have attracted widespread attention in academic field. In this paper, the current research status of multi-DOF micro-motion ultra-precision planar motors is introduced. The dominating structures of ultra-precision planar motors for ultra-precision positioning are presented. The main research contents and key technologies of ultra-precision planar motors are summarized. The development trend of ultra-precision planar motors is discussed.
| Original language | English |
|---|---|
| Pages (from-to) | 1-11 |
| Number of pages | 11 |
| Journal | Diangong Jishu Xuebao/Transactions of China Electrotechnical Society |
| Volume | 28 |
| Issue number | 7 |
| State | Published - 2013 |
Keywords
- Gravity compensator
- Micro-motion
- Multi-DOF
- Planar motor
- Ultra-precision positioning
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