Development of micro-vision system for manipulation robot

In consequence of the trend toward miniaturization of electrical equipments and micro mechanism, the importance of nano manipulation has become recognized. A dexterous micromanipulation system with dual-arm configuration is developed for the application in assembling micro machine and manipulating MEMS parts. In the micromanipulation, the system to observe microscopic objects is important as well as a system for actual manipulating microscopic object. In this paper, a new micro-vision system is developed for the manipulation robot. The system consists of a stereoscopic microscope, two CCD cameras and an auto focus system. The positions of micro object and manipulator are measured three dimensionally by using two CCD cameras. An image data compression method is also used to accelerate the speed of image processing. With this system, the peg in hole of 0.2mm diameter task has been finished automatically.