@inproceedings{426aab0bf80646cd992dd083c23608bd,
title = "Development of fluorine induced plasma activating room-temperature bonding stratage for high-pressure micro-nano fluidic devices",
abstract = "We developed room-temperature bonding of micro-nanofluidic device using fluorine induced plasma activation method. Fluorine was induced by O2 reactive ion etching (RIE) plasma treatment with Teflon Pieces which increased the bonding strength between fused silica glass substrates. The room-temperature bonded fused silica glass micro-nanofluidic device had high bonding strength as well as could work continuously without leakage during liquid introduction driven by air pressure even at 2000 kPa.",
keywords = "Bonding strength, Fluorine induced plasma activation, Micro-nanofluidic device, Room-temperature bonding, Teflon pieces",
author = "Kihoon Jang and Chenxi Wang and Yan Xu and Takehiko Kitamori",
year = "2012",
language = "英语",
isbn = "9780979806452",
series = "Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012",
publisher = "Chemical and Biological Microsystems Society",
pages = "1237--1239",
booktitle = "Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012",
note = "16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012 ; Conference date: 28-10-2012 Through 01-11-2012",
}