Development, Control, and Application of a Parallel-Type Hybrid-Actuated 6-PSS Precision Stage

Six degree-of-freedom (DOF) precision stage is crucial in optical engineering applications, which necessitates rapid velocity, submicrometer resolution, extensive workspace, and power-off self-locking functionality. Conventional multi-DOF precision stages may excel in certain motion performances while underperforming in others. This study introduces a hybrid concept of a 6-\underline{\mathbf{P}}SS precision stage actuated by frictional and electromagnetic forces in a parallel arrangement, with the frictional force generated by a multimode piezo-motor and the electromagnetic force produced by a voice coil motor. Unlike the conventional macro/micro precision stage, the proposed one features parallel-type actuation, avoiding some drawbacks such as complex kinematics and internal interference. The theoretical model of the system is established. A controller integrating proportion integration differentiation (PID) and sliding mode controller incorporating a disturbance compensator (SMC-DC) is developed to mitigate shock interference from the two forces, allowing the precision stage to attain optimal performance in resolution, stroke, and velocity, while also incorporating a power-off self-locking feature. The experimental setup is established to assess the feasibility of the suggested design. To further display the superiority in versatile actuation, the proposed 6-\underline{\mathbf{P}}SS stage is employed to align the single-mode fiber. The spatial optical coupling achieves 81% efficiency in just 32 s. The proposed methodology can be extended to further precision positioning applications.