Deterministic texturing of blazed nano-gratings with fully controlled 3D topography via oblique vibration-assisted diamond cutting

Blazed nano-gratings are critical functional components in a series of optoelectronic devices, such as diffractive waveguide AR displays and high-performance spectrometers, due to their high diffraction efficiency. Their optical performance depends critically on precise 3D topography, making fabrication technology a key focus in academic and industrial research. However, deterministic texturing of blazed gratings with high-precision and fully controlled 3D topographies on various metallic materials remains challenging. This paper proposes an oblique triangle vibration-assisted diamond cutting (OTVDC) process for the deterministic texturing of blazed nano-gratings with fully controlled 3D topographies. A bidirectional mapping framework linking process parameters to grating topography is established through kinematic analysis, providing the theoretical basis for deterministic topography control and process parameter selection. Furthermore, by comprehensively analyzing the experimentally measured tool trajectory, three-directional dynamic cutting forces, and chip morphology, the formation mechanism of blazed nano-gratings is systematically revealed. The material adaptability of the proposed process is demonstrated by successfully machining blazed nano-gratings with uniform and controlled 3D topography on aluminum alloy, brass, 304 stainless steel, and nickel-plated stainless steel, with minimal tool wear. In addition to deterministic texturing of blazed nano-gratings on various metallic materials, this work also advances fundamental understanding of oblique cutting processes and lays the foundation for generating other micro/nano structures with fully controlled 3D topography.