Determining the electron temperature in inductively coupled nitrogen plasmas by optical emission spectroscopy with molecular kinetic effects

An improved method to determine electron temperature in inductively coupled nitrogen plasmas using optical emission spectroscopy is proposed. The molecular kinetic model, which includes the kinetic rates of excited nitrogen molecules, evaluates the line ratio by including all emission lines in the first and second positive band system of molecular nitrogen. The calculated electron temperature is compared with measured values by a Langmuir probe in the discharge pressure range between 1 and 10 mTorr.