Determining polymer film thickness during manufacturing with broadband transmission

Chao Qiu; Xiaogang Sun; Meisheng Luan

doi:10.3788/COL201311.071201

Determining polymer film thickness during manufacturing with broadband transmission

Chao Qiu
, Xiaogang Sun^*
, Meisheng Luan

^*Corresponding author for this work

School of Instrumentation Science and Engineering

Harbin Institute of Technology

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

A novel broadband transmission method to determine polymer film thickness during manufacturing is proposed, and a measurement system is developed based on this method. The relationship between broadband optical power and film thickness is deduced according to the Lambert-Beer law. The system is composed of a halogen light and an optical power meter. Results show that the measurement error of this method is approximately 1 μm, and the resolution of the system is below 0.4 μm for polymer films with less than 100-μm thickness.

Original language	English
Article number	071201
Journal	Chinese Optics Letters
Volume	11
Issue number	7
DOIs	https://doi.org/10.3788/COL201311.071201
State	Published - Jul 2013

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title = "Determining polymer film thickness during manufacturing with broadband transmission",

abstract = "A novel broadband transmission method to determine polymer film thickness during manufacturing is proposed, and a measurement system is developed based on this method. The relationship between broadband optical power and film thickness is deduced according to the Lambert-Beer law. The system is composed of a halogen light and an optical power meter. Results show that the measurement error of this method is approximately 1 μm, and the resolution of the system is below 0.4 μm for polymer films with less than 100-μm thickness.",

author = "Chao Qiu and Xiaogang Sun and Meisheng Luan",

year = "2013",

month = jul,

doi = "10.3788/COL201311.071201",

language = "英语",

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T1 - Determining polymer film thickness during manufacturing with broadband transmission

AU - Qiu, Chao

AU - Sun, Xiaogang

AU - Luan, Meisheng

PY - 2013/7

Y1 - 2013/7

N2 - A novel broadband transmission method to determine polymer film thickness during manufacturing is proposed, and a measurement system is developed based on this method. The relationship between broadband optical power and film thickness is deduced according to the Lambert-Beer law. The system is composed of a halogen light and an optical power meter. Results show that the measurement error of this method is approximately 1 μm, and the resolution of the system is below 0.4 μm for polymer films with less than 100-μm thickness.

AB - A novel broadband transmission method to determine polymer film thickness during manufacturing is proposed, and a measurement system is developed based on this method. The relationship between broadband optical power and film thickness is deduced according to the Lambert-Beer law. The system is composed of a halogen light and an optical power meter. Results show that the measurement error of this method is approximately 1 μm, and the resolution of the system is below 0.4 μm for polymer films with less than 100-μm thickness.

UR - https://www.scopus.com/pages/publications/84883020615

U2 - 10.3788/COL201311.071201

DO - 10.3788/COL201311.071201

M3 - 文章

AN - SCOPUS:84883020615

SN - 1671-7694

VL - 11

JO - Chinese Optics Letters

JF - Chinese Optics Letters

IS - 7

M1 - 071201

ER -

Determining polymer film thickness during manufacturing with broadband transmission

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