Design research of a novel high speed nanometer positioning system on macro/micro driven for MEMS

Jie Degang; Liu Yanjie; Sun Lining; Cai Hegao

doi:10.1109/ICMA.2006.257719

Design research of a novel high speed nanometer positioning system on macro/micro driven for MEMS

Jie Degang^*
, Liu Yanjie
, Sun Lining
, Cai Hegao

^*Corresponding author for this work

School of Mechatronics Engineering

Harbin Institute of Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

4 Scopus citations

Abstract

With the increasing demand of high speed and precision positioning system for the devices packaging in Microelectromechanical System (MEMS), a novel high speed nanometer positioning XY stage system on macro/micro driven is presented in this paper. The stage integrates the advantage of macro stage driven by linear voice coil motor (VCM) such as long stroke and high speed, and the advantage of micro stage driven by piezoelectric actuator (PZT) such as high response and nanometer resolution. Adopting a novel elastic decoupling mechanism used to avoid the moving gap, the stage haves the entire decoupling characteristic in kinematics and control. Based on the analysis and optimization of the mechanism in high dynamic state, the XY stage prototype is manufactured. And based on the model of control system, the macro-micro control strategy with high speed and high accuracy is investigated. The simulation results verify that the system dynamic performance is significantly increased and the steady-state error is reduced to ±10nm.

Original language	English
Title of host publication	2006 IEEE International Conference on Mechatronics and Automation, ICMA 2006
Pages	843-847
Number of pages	5
DOIs	https://doi.org/10.1109/ICMA.2006.257719
State	Published - 2006
Event	2006 IEEE International Conference on Mechatronics and Automation, ICMA 2006 - Luoyang, China Duration: 25 Jun 2006 → 28 Jun 2006

Publication series

Name	2006 IEEE International Conference on Mechatronics and Automation, ICMA 2006
Volume	2006

Conference

Conference	2006 IEEE International Conference on Mechatronics and Automation, ICMA 2006
Country/Territory	China
City	Luoyang
Period	25/06/06 → 28/06/06

Keywords

Control strategy
High speed high accuracy
Macro/micro driven
XY stage

Access to Document

10.1109/ICMA.2006.257719

Cite this

Degang, J., Yanjie, L., Lining, S., & Hegao, C. (2006). Design research of a novel high speed nanometer positioning system on macro/micro driven for MEMS. In 2006 IEEE International Conference on Mechatronics and Automation, ICMA 2006 (pp. 843-847). Article 4026194 (2006 IEEE International Conference on Mechatronics and Automation, ICMA 2006; Vol. 2006). https://doi.org/10.1109/ICMA.2006.257719

@inproceedings{35410650653042acaebe69b80877350b,

title = "Design research of a novel high speed nanometer positioning system on macro/micro driven for MEMS",

abstract = "With the increasing demand of high speed and precision positioning system for the devices packaging in Microelectromechanical System (MEMS), a novel high speed nanometer positioning XY stage system on macro/micro driven is presented in this paper. The stage integrates the advantage of macro stage driven by linear voice coil motor (VCM) such as long stroke and high speed, and the advantage of micro stage driven by piezoelectric actuator (PZT) such as high response and nanometer resolution. Adopting a novel elastic decoupling mechanism used to avoid the moving gap, the stage haves the entire decoupling characteristic in kinematics and control. Based on the analysis and optimization of the mechanism in high dynamic state, the XY stage prototype is manufactured. And based on the model of control system, the macro-micro control strategy with high speed and high accuracy is investigated. The simulation results verify that the system dynamic performance is significantly increased and the steady-state error is reduced to ±10nm.",

keywords = "Control strategy, High speed high accuracy, Macro/micro driven, XY stage",

author = "Jie Degang and Liu Yanjie and Sun Lining and Cai Hegao",

year = "2006",

doi = "10.1109/ICMA.2006.257719",

language = "英语",

isbn = "1424404665",

series = "2006 IEEE International Conference on Mechatronics and Automation, ICMA 2006",

pages = "843--847",

booktitle = "2006 IEEE International Conference on Mechatronics and Automation, ICMA 2006",

note = "2006 IEEE International Conference on Mechatronics and Automation, ICMA 2006 ; Conference date: 25-06-2006 Through 28-06-2006",

}

Degang, J, Yanjie, L , Lining, S & Hegao, C 2006, Design research of a novel high speed nanometer positioning system on macro/micro driven for MEMS. in 2006 IEEE International Conference on Mechatronics and Automation, ICMA 2006., 4026194, 2006 IEEE International Conference on Mechatronics and Automation, ICMA 2006, vol. 2006, pp. 843-847, 2006 IEEE International Conference on Mechatronics and Automation, ICMA 2006, Luoyang, China, 25/06/06. https://doi.org/10.1109/ICMA.2006.257719

Design research of a novel high speed nanometer positioning system on macro/micro driven for MEMS. / Degang, Jie; Yanjie, Liu ; Lining, Sun et al.
2006 IEEE International Conference on Mechatronics and Automation, ICMA 2006. 2006. p. 843-847 4026194 (2006 IEEE International Conference on Mechatronics and Automation, ICMA 2006; Vol. 2006).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Design research of a novel high speed nanometer positioning system on macro/micro driven for MEMS

AU - Degang, Jie

AU - Yanjie, Liu

AU - Lining, Sun

AU - Hegao, Cai

PY - 2006

Y1 - 2006

N2 - With the increasing demand of high speed and precision positioning system for the devices packaging in Microelectromechanical System (MEMS), a novel high speed nanometer positioning XY stage system on macro/micro driven is presented in this paper. The stage integrates the advantage of macro stage driven by linear voice coil motor (VCM) such as long stroke and high speed, and the advantage of micro stage driven by piezoelectric actuator (PZT) such as high response and nanometer resolution. Adopting a novel elastic decoupling mechanism used to avoid the moving gap, the stage haves the entire decoupling characteristic in kinematics and control. Based on the analysis and optimization of the mechanism in high dynamic state, the XY stage prototype is manufactured. And based on the model of control system, the macro-micro control strategy with high speed and high accuracy is investigated. The simulation results verify that the system dynamic performance is significantly increased and the steady-state error is reduced to ±10nm.

AB - With the increasing demand of high speed and precision positioning system for the devices packaging in Microelectromechanical System (MEMS), a novel high speed nanometer positioning XY stage system on macro/micro driven is presented in this paper. The stage integrates the advantage of macro stage driven by linear voice coil motor (VCM) such as long stroke and high speed, and the advantage of micro stage driven by piezoelectric actuator (PZT) such as high response and nanometer resolution. Adopting a novel elastic decoupling mechanism used to avoid the moving gap, the stage haves the entire decoupling characteristic in kinematics and control. Based on the analysis and optimization of the mechanism in high dynamic state, the XY stage prototype is manufactured. And based on the model of control system, the macro-micro control strategy with high speed and high accuracy is investigated. The simulation results verify that the system dynamic performance is significantly increased and the steady-state error is reduced to ±10nm.

KW - Control strategy

KW - High speed high accuracy

KW - Macro/micro driven

KW - XY stage

UR - https://www.scopus.com/pages/publications/34247215013

U2 - 10.1109/ICMA.2006.257719

DO - 10.1109/ICMA.2006.257719

M3 - 会议稿件

AN - SCOPUS:34247215013

SN - 1424404665

SN - 9781424404667

T3 - 2006 IEEE International Conference on Mechatronics and Automation, ICMA 2006

SP - 843

EP - 847

BT - 2006 IEEE International Conference on Mechatronics and Automation, ICMA 2006

T2 - 2006 IEEE International Conference on Mechatronics and Automation, ICMA 2006

Y2 - 25 June 2006 through 28 June 2006

ER -

Design research of a novel high speed nanometer positioning system on macro/micro driven for MEMS

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