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Design of single-loop fourth order digital closed-loop readout circuit for silicon micro-gyroscope

  • Weiping Chen*
  • , Min Shi
  • , Wenjun Lv
  • , Qiqi Gai
  • , Xiaowei Liu
  • *Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

With the advances in technology, the development of microelectronics technology and the popularity of digital circuits, requirements for the performance of gyroscope becomes higher. The work that further making gyro digital in order to improve the performance becomes very important. View of this situation, a new digital readout interface circuit base on Sigma-Delta modulator for micro-mechanical gyro is researched in this paper. A micro-machined gyroscope readout system based on Sigma-Delta Modulator technology was built by using the Matlab Simulink. Its functional verification and simulation obtained SNR 80.2dB, the effective 13.2 bits having a good readout function.

Original languageEnglish
Title of host publication2012 International Conference on Optoelectronics and Microelectronics, ICOM 2012
Pages474-477
Number of pages4
DOIs
StatePublished - 2012
Externally publishedYes
Event2012 International Conference on Optoelectronics and Microelectronics, ICOM 2012 - Changchun, China
Duration: 23 Aug 201225 Aug 2012

Publication series

Name2012 International Conference on Optoelectronics and Microelectronics, ICOM 2012

Conference

Conference2012 International Conference on Optoelectronics and Microelectronics, ICOM 2012
Country/TerritoryChina
CityChangchun
Period23/08/1225/08/12

Keywords

  • Sigma-Delta modulation
  • gyroscope
  • readout

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