Design of RF MEMS phase shifter based on saw-shaped CPW

Tang Kai; Qun Wu; Yang Guo-hui; He Xun-jun; Fu Jia-hui; Le Wei Li

doi:10.1109/INDIN.2008.4618087

Design of RF MEMS phase shifter based on saw-shaped CPW

Tang Kai^*
, Qun Wu
, Yang Guo-hui
, He Xun-jun
, Fu Jia-hui
, Le Wei Li

^*Corresponding author for this work

School of Electronics and Information Engineering

Harbin Institute of Technology
National University of Singapore

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

The operating principle of the RF MEMS phase shifter is described. Then the equivalent circuit of the MEMS phase shifter has been established and the capacitances of the MEMS bridges in both "up" and "down" state are analyzed. Then the approach of using the saw-shaped CPW to decrease the return loss introduced by the insulation layer is proposed. By using network theory, the circuit simulation tool and CST microwave studio simulation tool, the proposed RF MEMS phase shifter is modeled. Simulation results show that the proposed model has the return loss less than -10dB and the insertion loss more than -2dB in 2GHz bandwidth range. At the same time, for one RF MEMS switch-type bridge, as high as 22.5 degrees phase shift is realized.

Original language	English
Title of host publication	Proceedings - IEEE INDIN 2008
Subtitle of host publication	6th IEEE International Conference on Industrial Informatics
Pages	166-170
Number of pages	5
DOIs	https://doi.org/10.1109/INDIN.2008.4618087
State	Published - 2008
Event	IEEE INDIN 2008: 6th IEEE International Conference on Industrial Informatics - Daejeon, Korea, Republic of Duration: 13 Jul 2008 → 16 Jul 2008

Publication series

Name	IEEE International Conference on Industrial Informatics (INDIN)
ISSN (Print)	1935-4576

Conference

Conference	IEEE INDIN 2008: 6th IEEE International Conference on Industrial Informatics
Country/Territory	Korea, Republic of
City	Daejeon
Period	13/07/08 → 16/07/08

Access to Document

10.1109/INDIN.2008.4618087

Cite this

@inproceedings{8d0517b675594ad8996aaf680cf87ced,

title = "Design of RF MEMS phase shifter based on saw-shaped CPW",

abstract = "The operating principle of the RF MEMS phase shifter is described. Then the equivalent circuit of the MEMS phase shifter has been established and the capacitances of the MEMS bridges in both {"}up{"} and {"}down{"} state are analyzed. Then the approach of using the saw-shaped CPW to decrease the return loss introduced by the insulation layer is proposed. By using network theory, the circuit simulation tool and CST microwave studio simulation tool, the proposed RF MEMS phase shifter is modeled. Simulation results show that the proposed model has the return loss less than -10dB and the insertion loss more than -2dB in 2GHz bandwidth range. At the same time, for one RF MEMS switch-type bridge, as high as 22.5 degrees phase shift is realized.",

author = "Tang Kai and Qun Wu and Yang Guo-hui and He Xun-jun and Fu Jia-hui and Li, \{Le Wei\}",

year = "2008",

doi = "10.1109/INDIN.2008.4618087",

language = "英语",

isbn = "9781424421718",

series = "IEEE International Conference on Industrial Informatics (INDIN)",

pages = "166--170",

booktitle = "Proceedings - IEEE INDIN 2008",

note = "IEEE INDIN 2008: 6th IEEE International Conference on Industrial Informatics ; Conference date: 13-07-2008 Through 16-07-2008",

}

Kai, T, Wu, Q, Guo-hui, Y, Xun-jun, H, Jia-hui, F & Li, LW 2008, Design of RF MEMS phase shifter based on saw-shaped CPW. in Proceedings - IEEE INDIN 2008: 6th IEEE International Conference on Industrial Informatics., 4618087, IEEE International Conference on Industrial Informatics (INDIN), pp. 166-170, IEEE INDIN 2008: 6th IEEE International Conference on Industrial Informatics, Daejeon, Korea, Republic of, 13/07/08. https://doi.org/10.1109/INDIN.2008.4618087

Design of RF MEMS phase shifter based on saw-shaped CPW. / Kai, Tang; Wu, Qun; Guo-hui, Yang et al.
Proceedings - IEEE INDIN 2008: 6th IEEE International Conference on Industrial Informatics. 2008. p. 166-170 4618087 (IEEE International Conference on Industrial Informatics (INDIN)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Design of RF MEMS phase shifter based on saw-shaped CPW

AU - Kai, Tang

AU - Wu, Qun

AU - Guo-hui, Yang

AU - Xun-jun, He

AU - Jia-hui, Fu

AU - Li, Le Wei

PY - 2008

Y1 - 2008

N2 - The operating principle of the RF MEMS phase shifter is described. Then the equivalent circuit of the MEMS phase shifter has been established and the capacitances of the MEMS bridges in both "up" and "down" state are analyzed. Then the approach of using the saw-shaped CPW to decrease the return loss introduced by the insulation layer is proposed. By using network theory, the circuit simulation tool and CST microwave studio simulation tool, the proposed RF MEMS phase shifter is modeled. Simulation results show that the proposed model has the return loss less than -10dB and the insertion loss more than -2dB in 2GHz bandwidth range. At the same time, for one RF MEMS switch-type bridge, as high as 22.5 degrees phase shift is realized.

AB - The operating principle of the RF MEMS phase shifter is described. Then the equivalent circuit of the MEMS phase shifter has been established and the capacitances of the MEMS bridges in both "up" and "down" state are analyzed. Then the approach of using the saw-shaped CPW to decrease the return loss introduced by the insulation layer is proposed. By using network theory, the circuit simulation tool and CST microwave studio simulation tool, the proposed RF MEMS phase shifter is modeled. Simulation results show that the proposed model has the return loss less than -10dB and the insertion loss more than -2dB in 2GHz bandwidth range. At the same time, for one RF MEMS switch-type bridge, as high as 22.5 degrees phase shift is realized.

UR - https://www.scopus.com/pages/publications/54849412098

U2 - 10.1109/INDIN.2008.4618087

DO - 10.1109/INDIN.2008.4618087

M3 - 会议稿件

AN - SCOPUS:54849412098

SN - 9781424421718

T3 - IEEE International Conference on Industrial Informatics (INDIN)

SP - 166

EP - 170

BT - Proceedings - IEEE INDIN 2008

T2 - IEEE INDIN 2008: 6th IEEE International Conference on Industrial Informatics

Y2 - 13 July 2008 through 16 July 2008

ER -

Design of RF MEMS phase shifter based on saw-shaped CPW

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